Graphite Carbon-Doped Sb2Te Nanostructures for Phase-Change Memory Applications

被引:6
|
作者
Xu, Peng [1 ]
Meng, Yun [2 ]
Li, Zhen [3 ,4 ]
Liu, Xiaolin [1 ]
Zhou, Jian [3 ]
Song, Sannian [5 ]
Song, Zhitang [5 ]
Sun, Zhimei [3 ]
Wu, Liangcai [1 ,5 ]
机构
[1] Donghua Univ, Coll Sci, Dept Appl Phys, Shanghai 201620, Peoples R China
[2] Shandong Normal Univ, Sch Phys & Elect, Jinan 250014, Peoples R China
[3] Beihang Univ, Sch Mat Sci & Engn, Beijing 100191, Peoples R China
[4] Univ Warwick, Sch Engn, Coventry CV47AL, England
[5] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Shanghai 200050, Peoples R China
基金
中国国家自然科学基金;
关键词
phase-change memory; graphite carbon doping; fast switching speed; low thickness change; lowresistance drift; low power consumption; GE2SB2TE5; CRYSTALLIZATION; FILMS; PERFORMANCE; DENSITY; SPEED;
D O I
10.1021/acsanm.3c01022
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
High thermal stability, fast operation speed, low thicknessvariation,and low resistance drift of phase-change nanomaterials are the essentialcharacteristics in phase-change memory (PCM) applications. In thiswork, we put forward a graphite carbon-doped Sb2Te (C-Sb2Te) chalcogenide with semiconductor process compatibility.Our results prove that the proposed C-Sb2Te has excellentthermal stability and high operation speed. More importantly, thethickness change and resistance drift are only 0.89% and 0.0149, respectively.The C-Sb2Te-based memory device exhibits a high switchingspeed to the instrument test limit (5 ns) with a large resistanceratio, low operation voltage (2 V), and low power consumption (6.9pJ). The proposed C-Sb2Te nanostructure material exceedsboth conventional Ge2Sb2Te5 and transition-metal-dopedSb(2)Te materials in terms of its performance. Abinitio molecular dynamics simulations reveal that C-Cand C-Sb bonds as well as C-C chains are formed in C-Sb2Te, and C doping constrains phase transition in a small regionand refines grains of C-Sb2Te, thus resulting in the highperformance. Our study suggests that C-Sb2Te is a potentialcandidate for high-speed, high-thermal-stability, and high-reliabilityPCM applications.
引用
收藏
页码:8668 / 8674
页数:7
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