3D integration enables ultralow-noise isolator-free lasers in silicon photonics

被引:81
|
作者
Xiang, Chao [1 ,2 ]
Jin, Warren [1 ,3 ]
Terra, Osama [1 ,6 ]
Dong, Bozhang [1 ]
Wang, Heming [1 ]
Wu, Lue [4 ]
Guo, Joel [1 ]
Morin, Theodore J. J. [1 ]
Hughes, Eamonn [5 ]
Peters, Jonathan [1 ]
Ji, Qing-Xin [4 ]
Feshali, Avi [3 ]
Paniccia, Mario [3 ]
Vahala, Kerry J. J. [4 ]
Bowers, John E. E. [1 ,5 ]
机构
[1] Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
[2] Univ Hong Kong, Dept Elect & Elect Engn, Hong Kong, Peoples R China
[3] Anello Photon, Santa Clara, CA USA
[4] CALTECH, TJ Watson Lab Appl Phys, Pasadena, CA USA
[5] Univ Calif Santa Barbara, Mat Dept, Santa Barbara, CA 93106 USA
[6] Natl Inst Stand, Primary Length & Laser Technol Lab, Giza, Egypt
关键词
CIRCUITS; REGIMES;
D O I
10.1038/s41586-023-06251-w
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
Photonic integrated circuits are widely used in applications such as telecommunications and data-centre interconnects(1-5). However, in optical systems such as microwave synthesizers(6), optical gyroscopes(7) and atomic clocks(8), photonic integrated circuits are still considered inferior solutions despite their advantages in size, weight, power consumption and cost. Such high-precision and highly coherent applications favour ultralow-noise laser sources to be integrated with other photonic components in a compact and robustly aligned format-that is, on a single chip-for photonic integrated circuits to replace bulk optics and fibres. There are two major issues preventing the realization of such envisioned photonic integrated circuits: the high phase noise of semiconductor lasers and the difficulty of integrating optical isolators directly on-chip. Here we challenge this convention by leveraging three-dimensional integration that results in ultralow-noise lasers with isolator-free operation for silicon photonics. Through multiple monolithic and heterogeneous processing sequences, direct on-chip integration of III-V gain medium and ultralow-loss silicon nitride waveguides with optical loss around 0.5 decibels per metre are demonstrated. Consequently, the demonstrated photonic integrated circuit enters a regime that gives rise to ultralow-noise lasers and microwave synthesizers without the need for optical isolators, owing to the ultrahigh-quality-factor cavity. Such photonic integrated circuits also offer superior scalability for complex functionalities and volume production, as well as improved stability and reliability over time. The three-dimensional integration on ultralow-loss photonic integrated circuits thus marks a critical step towards complex systems and networks on silicon.
引用
收藏
页码:78 / +
页数:18
相关论文
共 50 条
  • [1] 3D integration enables ultralow-noise isolator-free lasers in silicon photonics
    Chao Xiang
    Warren Jin
    Osama Terra
    Bozhang Dong
    Heming Wang
    Lue Wu
    Joel Guo
    Theodore J. Morin
    Eamonn Hughes
    Jonathan Peters
    Qing-Xin Ji
    Avi Feshali
    Mario Paniccia
    Kerry J. Vahala
    John E. Bowers
    Nature, 2023, 620 : 78 - 85
  • [2] Dynamic and nonlinear properties of epitaxial quantum dot lasers on silicon for isolator-free integration
    JIANAN DUAN
    HEMING HUANG
    BOZHANG DONG
    JUSTIN C.NORMAN
    ZEYU ZHANG
    JOHN E.BOWERS
    FRéDéRIC GRILLOT
    Photonics Research, 2019, (11) : 1222 - 1228
  • [3] Dynamic and nonlinear properties of epitaxial quantum dot lasers on silicon for isolator-free integration
    JIANAN DUAN
    HEMING HUANG
    BOZHANG DONG
    JUSTIN CNORMAN
    ZEYU ZHANG
    JOHN EBOWERS
    FRDRIC GRILLOT
    Photonics Research, 2019, 7 (11) : 1222 - 1228
  • [4] Dynamic and nonlinear properties of epitaxial quantum dot lasers on silicon for isolator-free integration
    Duan, Jianan
    Huang, Heming
    Dong, Bozhang
    Norman, Justin C.
    Zhang, Zeyu
    Bowers, John E.
    Grillot, Frederic
    PHOTONICS RESEARCH, 2019, 7 (11) : 1222 - 1228
  • [5] 3D hybrid integrated lasers for silicon photonics
    Song, B.
    Pinna, S.
    Liu, Y.
    Megalini, L.
    Klamkin, J.
    SILICON PHOTONICS XIII, 2018, 10537
  • [6] Isolator-Free Integration of C-Band InAs-InP Quantum Dash Buried Heterostructure Lasers with Silicon Waveguides
    Schmid, Jens H.
    Rahim, Mohamed
    Pakulski, Grzegorz
    Vachon, Martin
    Janz, Siegfried
    Cheben, Pavel
    Xu, Dan-Xia
    Poole, Philip J.
    Barrios, Pedro
    Jiang, Weihong
    Lapointe, Jean
    Melati, Daniele
    2020 22ND INTERNATIONAL CONFERENCE ON TRANSPARENT OPTICAL NETWORKS (ICTON 2020), 2020,
  • [7] Integration of ultralow-noise single-frequency lasers with extrinsic seismic sensors using optical transducers
    Carr, Dustin W.
    Wang, Yong
    22ND INTERNATIONAL CONFERENCE ON OPTICAL FIBER SENSORS, PTS 1-3, 2012, 8421
  • [8] Scalable 3D dense integration of photonics on bulk silicon
    Sherwood-Droz, Nicolas
    Lipson, Michal
    OPTICS EXPRESS, 2011, 19 (18): : 17758 - 17765
  • [9] Qualification of 3D Integrated Silicon Photonics
    Fere, Massimo
    Gobbato, Livio
    Tremolada, Matteo
    Shaw, Mark
    Kermarrec, Olivier
    Besset, Carine
    Curti, Roberto
    Fiabane, Fabio Pietro
    Zhang, Xueren
    PROCEEDINGS OF THE 2016 IEEE 18TH ELECTRONICS PACKAGING TECHNOLOGY CONFERENCE (EPTC), 2016, : 73 - 78
  • [10] Packaging Silicon Photonics with Polymer Waveguides for 3D Electro-Optical Integration
    Mangal, N.
    Missinne, J.
    Van Steenberge, G.
    Van Campenhout, J.
    Snyder, B.
    30TH ANNUAL CONFERENCE OF THE IEEE PHOTONICS SOCIETY (IPC), 2017, : 707 - 708