A High-Linearity Closed-Loop Capacitive Micro-Accelerometer Based on Ring-Diode Capacitance Detection

被引：5

作者：

Tao, Qi ^{[1
]}

Tang, Bin ^{[1
]}

机构：

[1] China Acad Engn Phys, Inst Elect Engn, Mianyang 621000, Peoples R China

来源：

SENSORS | 2023年 / 23卷 / 03期

基金：

中国国家自然科学基金;

关键词：

capacitive accelerometer; closed-loop; low non-linearity; MEMS;

D O I：

10.3390/s23031568

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

This paper presents an implementation scheme and experimental evaluation of a high-linearity closed-loop capacitive accelerometer based on ring-diode capacitance detection. By deducing the capacitance detection model of the ring-diode considering the influence of the diode, the existing theoretical model error of the ring-diode is corrected and a closed-loop scheme of reusing the detection electrode and the control electrode of the MEMS die is designed to apply this detection scheme to the parallel-plate accelerometer, which only has three independent electrodes. After analyzing the non-linear problems in the existing closed-loop control schemes, a theoretically absolute linear closed-loop control scheme is proposed, and an integrated closed-loop accelerometer is realized by combining the closed-loop diode detection. The experimental results of the ring-diode detection model are in agreement with the theoretical formula. The non-linearity of the accelerometer within +/- 1 g after the closed-loop is 130 ppm, compared with 1500 ppm when the open-loop is used.

引用

页数：14