Experimental study of the electron beam application for evaporation cobalt, tin and copper

被引:3
作者
Wang, Dawei [1 ,2 ,3 ]
Liu, Zhiguo [2 ]
Liu, Wenrui [2 ]
机构
[1] Adv Elect Mat Inst GRINM Grp Co Ltd, 2 XinJieKouWai St, Beijing 100088, Peoples R China
[2] GRIMAT Engn Inst Co Ltd, 11 XingKeEast St, Beijing 101407, Peoples R China
[3] Gen Res Inst Nonferrous Met, 2 XinJieKouWai St, Beijing 100088, Peoples R China
关键词
Electron beam; Evaporation coefficient; Thermogravimetric analysis; Metals and alloys; Burning loss; VACUUM EVAPORATION; THIN-FILMS; SILVER;
D O I
10.1016/j.vacuum.2022.111757
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Studies on the kinetic theory of the evaporation of metals in vacuum have already existed, and there have been various applications, such as evaporation filming and powder making in vacuum. However, the vast amount of needed physical parameters has become an obstacle in achieving an accurate measurement, which limits their applications in turn. In addition, there is a lack of experimental research data and simple measurements about the intensive evaporation with the electron beam technology at high temperatures. In this study, a new ther-mogravimetric analysis (TGA) measuring device was designed for evaporation with the electron beam tech-nology, to track the temperature and mass of the molten pool in real time and obtain abundant and instantaneous experimental data with complete details during the evaporation process. The starting evaporation temperature and the evaporation rate of cobalt, tin, and copper have been measured. In this study, the starting evaporation temperatures of cobalt, tin, and copper are 2173 +/- 5 K, 1970 +/- 5 K, and 1523 +/- 5 K respectively. At 2200-2271 K, the evaporation coefficient of Co is stabilized at around 0.5 with a decreasing tendency; at 1873-2050K, the evaporation coefficient of Cu decreases rapidly from 0.88 to 0.39; at 1979-2038 K, the evaporation coefficient of Sn increases from 0.27 to 0.64.
引用
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页数:6
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