Schulz, Stefan E.
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Tech Univ Chemnitz, Ctr Microtechnol, D-09126 Chemnitz, Sachsen, Germany
Ctr Adv Elect Dresden CFAED, D-01062 Dresden, Saxony, Germany
Fraunhofer Inst Elect Nano Syst, Dept Back End Line, D-09126 Chemnitz, Sachsen, Germany Tech Univ Chemnitz, Ctr Microtechnol, D-09126 Chemnitz, Sachsen, Germany