Hybrid fabrication of flexible fully printed carbon nanotube field-effect transistors

被引:5
作者
Zhang, Hao-Wen [1 ]
Liao, Xiao-Han [1 ]
Wang, Yang-Sheng [1 ]
Luo, Jian-Qiang [1 ]
Xu, Zhao-Quan [1 ]
Chen, Yuan-Ming [1 ,2 ]
Feng, Zhe-Sheng [1 ]
Wang, Yan [1 ,2 ]
机构
[1] Univ Elect Sci & Technol China, Sch Mat & Energy, Chengdu 611731, Sichuan, Peoples R China
[2] Sichuan Leader Tech Co Ltd, Suining 629000, Sichuan, Peoples R China
基金
中国国家自然科学基金;
关键词
THIN-FILM TRANSISTORS; LARGE-AREA; TRANSPARENT; GRAPHENE;
D O I
10.1007/s10854-023-11585-2
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A facile and cost-efficient multiple fully printed method to fabricate p-type carbon nanotube field-effect transistor (CNTFET) on the flexible paper substrate is proposed in this paper. Through the selective separation of polymer poly[(9,9-dioctylfluorenyl-2,7-diyl)-alt-(benzo [2,1,3] thiadiazol-4,7-diyl)] (PFO-BT) and stable dispersion of sodium dodecylbenzene sulfonate (SDBS) surfactant, the obtained CNTs individually dispersed ink (denoted as mono-dispersion ink) is applied in standard inkjet printers. The multiple system of Roll-to-Roll (R2R) flexo printing (to print silver-based catalyst ink for the subsequent electroless copper plating process) and inkjet printing (to print semiconductor channel material) is adopted in p-type metal-oxide-semiconductor field-effect transistor (MOSFET) fabrication with good printing line accuracy and high-throughput. The transistors obtained by this fabrication process can maintain an on-off ratio (I-on/I-off approximate to 2806), with approximately 70% of the devices' on-off ratio is concentrated in 10(3)-10(4) with a threshold voltage of about + 3 V. The flexible and fully printed strategy presented in this paper has a strong migration ability, which can be applied to a variety of semiconductor channel materials with diverse flexible substrates (e.g., polyimide, polyethylene terephthalate, etc.) and provide an effective and facile route for large-scale preparation of flexible integrated electronic devices.
引用
收藏
页数:15
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