Ultrasensitive Pressure Sensor Based on an Integrated Circular Piezoelectric MEMS Resonator and Diaphragm Structure

被引：2

作者：

Kumar, Praveen ^{[1
]}

Sahana, D. ^{[1
]}

Chandrashekar, L. N. ^{[1
]}

Jeyaseelan, Antony ^{[1
]}

Nayak, M. M. ^{[1
]}

Pratap, Rudra ^{[1
,2
]}

Pillai, Gayathri ^{[1
]}

机构：

[1] Indian Inst Sci, Ctr Nano Sci & Engn, Bengaluru 560012, India

[2] Plaksha Univ, Mohali 140306, India

来源：

IEEE SENSORS LETTERS | 2023年 / 7卷 / 12期

关键词：

Mechanical sensors; microelectromechanical system (MEMS); modes; piezoelectric resonator; resonant pressure sensor;

D O I：

10.1109/LSENS.2023.3326127

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this letter, we report an ultrasensitive pressure sensor based on an integrated circular piezoelectric microelectromechanical resonator and stainless-steel diaphragm structure. Finite-element analysis is conducted to validate the working principle of the sensor, identify modes with high-pressure sensitivity, and estimate the resonance frequency drift. The sensor operates on the principle of frequency shift caused by the coupling between the applied pressure and stress of the resonator. The high electromechanical coupling coefficient of lead zirconate titanate facilitates seamless transduction between the physical domains of interest. The sensitivity of the sensor is 31 711 and 14 600 ppm/bar for the first and second flexural modes with nonlinearity of 2.2% full scale (FS) and 0.84% FS, respectively, in the operating range of 0-5 bar at room temperature. The sensor exhibits excellent repeatability for multiple bidirectional pressure sweep. The proof of concept demonstrated in this letter will enable miniaturization and batch fabrication of pressure sensors with high sensitivity and bandwidth of operation.

引用

页码：1 / 4

页数：4

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