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- [3] Waveguide Bragg Grating Optical MEMS Accelerometer based on Circular Diaphragm 2022 WORKSHOP ON RECENT ADVANCES IN PHOTONICS (WRAP), 2022, : 172 - 173
- [10] Research of Resonator Fabrication Technology Based on Silicon Resonant Pressure Sensor PROCEEDINGS OF THE 2ND INTERNATIONAL FORUM ON MANAGEMENT, EDUCATION AND INFORMATION TECHNOLOGY APPLICATION (IFMEITA 2017), 2017, 130 : 269 - 272