Macro-motion structure optimization and experimental study of coaxial integrated macro-micro composite actuator

Aiming at the contradiction between large stroke and high precision characteristics of precision positioning table, a coaxial integrated macro-micro composite actuators (MMCA) with large stroke and high precision characteristics is proposed by combining voice coil motor (VCM), and giant magnetostrictive actuator(GMA). In order to increase macro-motion stability and reduce fretting error, its structural parameters are optimized by finite element analysis, and the optimal combination mode is designed by using orthogonal experimental scheme. Finally, a model machine is developed and an experimental platform is built for performance testing. The results show that: macro external yoke(& alpha;), macro inner yoke(f3), and Wall thickness of magnetic isolator(& gamma;) it has different effects on macro-motion stability and fretting error of MMCA, When & alpha;=12mm, f3=5mm, & gamma;=12mm, the output performance of the MMCA is the best. The maximum macro-motion force of the model machine can reach 294.45N, and the maximum micro error is only 4nm. This shows that the proposed design scheme of coaxial integrated MMCA is reasonable and feasible, which lays a theoretical and technical foundation for further optimization and development of precision positioning worktable with, large stroke and high-precision characteristics.