A Highly Sensitive Flexible Pressure Sensor Based on Inter-Comb Structured Graphene Electrodes

被引:16
作者
Lu, Shilin [1 ]
Nie, Tianchun [1 ]
Li, Yang [2 ]
Li, Yuanyue [1 ]
Yao, Zhao [1 ]
Kim, Nam Young [3 ]
Li, Shandong [1 ]
机构
[1] Qingdao Univ, Coll Elect & Informat, Qingdao 266071, Peoples R China
[2] Univ Jinan, Sch Informat Sci & Engn, Jinan 250022, Peoples R China
[3] Kwangwoon Univ, Dept Elect Engn, Seoul 01897, South Korea
基金
中国国家自然科学基金;
关键词
Electrodes; Sensors; Sensitivity; Pressure sensors; Capacitance; Graphene; Temperature sensors; Capacitive pressure sensors; graphene electrodes; high sensitivity; inter-comb structure; laser scribe; NANOGENERATOR;
D O I
10.1109/TED.2023.3248000
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Susceptible and flexible pressure sensors have broad application prospects and market demands in bionic skin, human-machine interface, and intelligent wearable electronic devices. However, optimizing the sensor's sensitivity through a simple, low-cost process is still a considerable challenge. In this work, the sensitivity of a capacitive pressure sensor was effectively improved by optimizing the geometry of the laser-scribed graphene (LSG) electrodes. The pressure sensor, based on the inter-comb structured LSG electrodes and polyvinyl pyrrolidone nanofiber membrane (PVP NM) dielectric layer, has a high sensitivity (4.352 kPa(-1) at 0-2 kPa), a fast response/recovery time (40/37 ms), an ultralow detection limit (similar to 12 Pa), and excellent mechanical stability (6000 cycles). The sensor developed in this research can be used in health monitoring such as carotid artery pulsation and respiratory disease. In addition, the 6 x 6 sensor array can precisely characterize the regional pressure distribution. This study demonstrates the significant potential of the inter-comb structured LSG electrodes in highly sensitive flexible pressure sensors.
引用
收藏
页码:1865 / 1870
页数:6
相关论文
共 35 条
[1]   Enhancing the Performance of Polygon Monopole Antenna Using Graphene/TMDCs Heterostructures [J].
Abdul-Aziz, Mohamed R. R. ;
Mohassieb, Shaimaa A. ;
Eltresy, Nermeen A. ;
Yousef, Moataz M. K. ;
Anis, Badawi ;
Abdellatif, Sameh O. ;
Khalil, Ahmed S. G. .
IEEE TRANSACTIONS ON NANOTECHNOLOGY, 2020, 19 :269-273
[2]   Surface-mountable capacitive tactile sensors with flipped CMOS-diaphragm on a flexible and stretchable bus line [J].
Asano, Sho ;
Muroyama, Masanori ;
Bartley, Travis ;
Kojima, Takahiro ;
Nakayama, Takahiro ;
Yamaguchi, Ui ;
Yamada, Hitoshi ;
Nonomura, Yutaka ;
Hata, Yoshiyuki ;
Funabashi, Hirofumi ;
Tanaka, Shuji .
SENSORS AND ACTUATORS A-PHYSICAL, 2016, 240 :167-176
[3]   Black Phosphorus@Laser-Engraved Graphene Heterostructure-Based Temperature-Strain Hybridized Sensor for Electronic-Skin Applications [J].
Chhetry, Ashok ;
Sharma, Sudeep ;
Barman, Sharat Chandra ;
Yoon, Hyosang ;
Ko, Seokgyu ;
Park, Chani ;
Yoon, Sanghyuk ;
Kim, Hyunsik ;
Park, Jae Yeong .
ADVANCED FUNCTIONAL MATERIALS, 2021, 31 (10)
[4]   The Establishment and Verification of the Sensitivity Model of the Piezoresistive Pressure Sensor Based on the New Peninsula Structure [J].
Gao, Chengwu ;
Zhang, Dacheng .
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2022, 31 (02) :305-314
[5]   Anodized Aluminum Oxide-Assisted Low-Cost Flexible Capacitive Pressure Sensors Based on Double-Sided Nanopillars by a Facile Fabrication Method [J].
Guo, Yunjian ;
Gao, Song ;
Yue, Wenjing ;
Zhang, Chunwei ;
Li, Yang .
ACS APPLIED MATERIALS & INTERFACES, 2019, 11 (51) :48594-48603
[6]   Performance Enhancement of Flexible and Self-Powered PVDF-ZnO Based Tactile Sensors [J].
Hari, M. Arjun ;
Karumuthil, Subash Cherumannil ;
Varghese, Soney ;
Rajan, Lintu .
IEEE SENSORS JOURNAL, 2022, 22 (10) :9336-9343
[7]   High-Performance Flexible Capacitive Proximity and Pressure Sensors with Spiral Electrodes for Continuous Human-Machine Interaction [J].
Huang, Jinrong ;
Wang, Huiting ;
Li, Jie-an ;
Zhang, Shuming ;
Li, Hao ;
Xin, Ming ;
Yan, Ke ;
Cheng, Wen ;
He, Daowei ;
Wang, Xinran ;
Pan, Lijia ;
Shi, Yi .
ACS MATERIALS LETTERS, 2022, 4 (11) :2261-2272
[8]   A controllable gradient structure of hydrophobic composite fabric constructed by silver nanowires and polyvinylidene fluoride microspheres for electromagnetic interference shielding with low reflection [J].
Jia, Li ;
Ding, Xin ;
Sun, Jun ;
Zhang, Xian ;
Tian, Xingyou .
COMPOSITES PART A-APPLIED SCIENCE AND MANUFACTURING, 2022, 156
[9]   A highly sensitive biodegradable pressure sensor based on nanofibrous dielectric [J].
Khalid, Muhammad Asad Ullah ;
Ali, Muhsin ;
Soomro, Afaque Manzoor ;
Kim, Soo Wan ;
Kim, Hyun Bum ;
Lee, Byung-Gul ;
Choi, Kyung Hyun .
SENSORS AND ACTUATORS A-PHYSICAL, 2019, 294 :140-147
[10]   Environmentally stable, mechanically flexible, self-adhesive, and electrically conductive Ti3C2TX MXene hydrogels for wide-temperature strain sensing [J].
Li, Shi-Neng ;
Yu, Zhi-Ran ;
Guo, Bi-Fan ;
Guo, Kun-Yu ;
Li, Yang ;
Gong, Li-Xiu ;
Zhao, Li ;
Bae, Joonho ;
Tang, Long-Cheng .
NANO ENERGY, 2021, 90