Ammonia sensing characteristics of an ITO-V2O5 based chemoresistive dual-type gas sensors (CDGS) decorated with platinum nanoparticles

被引:12
作者
Yao, Pao-Chi [1 ]
Niu, Jing-Shiuan [1 ]
Dai, Guang-Yu [1 ]
Jian, Jia-Jin [1 ]
Hsu, Wei-Chou [2 ]
Lin, Kun-Wei [3 ]
Liu, Wen-Chau [2 ]
机构
[1] Natl Cheng Kung Univ, Inst Microelect, Dept Elect Engn, 1 Univ Rd, Tainan 70101, Taiwan
[2] Natl Cheng Kung Univ, Acad Innovat Semicond & Sustainable Mfg, Inst Microelect, Dept Elect Engn, 1 Univ Rd, Tainan 70101, Taiwan
[3] Chaoyang Univ Technol, Dept Comp Sci & Informat Engn, Taichung 41349, Taiwan
关键词
CDGS; ITO; Pt NP; NH3 gas sensing; THIN-FILM; TEMPERATURE; PERFORMANCE; NH3;
D O I
10.1016/j.snb.2023.134071
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
A new chemoresistive dual-type gas sensors (CDGS) has been produced and reported. The studied CDGS contains an indium tin oxide (ITO) thin layer, a vanadium (V2O5) thin layer, and platinum (Pt) nanoparticles (NPs) on a chip. The n- and p-type ammonia (NH3) sensing behaviors of the studied Pt NP/ ITO-V2O5 CDGS were systematically investigated. Initially, a high-resolution scanning electron microscopy (HRSEM), atomic force microscopy (AFM), energy dispersive X-ray spectroscopy (EDS), and X-ray photoelectron spectroscopy (XPS) were employed to investigate the intrinsic properties. In experiments, significantly different current-voltage (I-V) curves of Pt NP/ ITO (Sensor A) and Pt NP/ V2O5 (Sensor B) were obtained in NH3-contained ambiences. The sensing response SR values for Sensors A and B are 7.54 and 1.14, respectively, under 1000 ppm NH3/air gas at 275 degrees C. The various transient current-time (I-t) curves, under 1, 10, 100, and 1000 ppm NH3 /air gas at 275 degrees C, for Sensors A and B were clearly observed. Moreover, both Sensors A and B demonstrated good selectivity toward NH3 gas. Thus, the presented Pt NP/ ITO-V2O5 CDGS provides the prominent potentiality and flexibility for NH3 gas detecting application.
引用
收藏
页数:10
相关论文
共 43 条
[1]   MODELING STUDIES OF THE ATMOSPHERIC RELEASE AND TRANSPORT OF AMMONIA IN ANTICYCLONIC EPISODES [J].
APSIMON, HM ;
BARKER, BM ;
KAYIN, S .
ATMOSPHERIC ENVIRONMENT, 1994, 28 (04) :665-678
[2]   TiO2-SnO2 nanostructures and their H2 sensing behavior [J].
Carney, CM ;
Yoo, S ;
Akbar, SA .
SENSORS AND ACTUATORS B-CHEMICAL, 2005, 108 (1-2) :29-33
[3]   Ultra-low loading of iron oxide on Pt/Al2O3 for enhanced catalytic activity of CO oxidation at room temperature: A simple method for applications [J].
Cha, Byeong Jun ;
Kim, Soong Yeon ;
Choi, Chang Min ;
Sung, Ji Yeong ;
Choi, Myoung Choul ;
Seo, Hyun Ook ;
Kim, Young Dok .
CHEMICAL ENGINEERING JOURNAL, 2021, 404
[4]   A Highly Sensitive Ammonia (NH3) Sensor Based on a Tungsten Trioxide (WO3) Thin Film Decorated With Evaporated Platinum (Pt) Nanoparticles [J].
Chang, Ching-Hong ;
Chou, Tzu-Chieh ;
Chen, Wei-Cheng ;
Niu, Jing-Shivan ;
Lin, Kun-Wei ;
Cheng, Shiou-Ying ;
Liu, Wen-Chau .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2020, 67 (03) :1176-1182
[5]   Characteristics of a Pt/NiO thin film-based ammonia gas sensor [J].
Chen, Huey-Ing ;
Hsiao, Cheng-Yu ;
Chen, Wei-Cheng ;
Chang, Ching-Hong ;
Chou, Tzu-Chieh ;
Liu, I-Ping ;
Lin, Kun-Wei ;
Liu, Wen-Chau .
SENSORS AND ACTUATORS B-CHEMICAL, 2018, 256 :962-967
[6]   Characteristics of ZnO nanorods-based ammonia gas sensors with a cross-linked configuration [J].
Chen, Tai-You ;
Chen, Huey-Ing ;
Hsu, Chi-Shiang ;
Huang, Chien-Chang ;
Wu, Jian-Sheng ;
Chou, Po-Cheng ;
Liu, Wen-Chau .
SENSORS AND ACTUATORS B-CHEMICAL, 2015, 221 :491-498
[7]   Characteristics of Indium Tin Oxide (ITO) Nanoparticles Recovered by Lift-off Method from TFT-LCD Panel Scraps [J].
Choi, Dongchul ;
Hong, Sung-Jei ;
Son, Yongkeun .
MATERIALS, 2014, 7 (12) :7662-7669
[8]   Hydrothermal synthesis and NH3 gas sensing property of WO3 nanorods at low temperature [J].
Dac Dien Nguyen ;
Duc Vuong Dang ;
Duc Chien Nguyen .
ADVANCES IN NATURAL SCIENCES-NANOSCIENCE AND NANOTECHNOLOGY, 2015, 6 (03)
[9]   Room Temperature Ammonia Gas Sensor Based on p-Type-like V2O5 Nanosheets towards Food Spoilage Monitoring [J].
Duy, Lai Van ;
Nguyet, To Thi ;
Le, Dang Thi Thanh ;
Duy, Nguyen Van ;
Nguyen, Hugo ;
Biasioli, Franco ;
Tonezzer, Matteo ;
Di Natale, Corrado ;
Hoa, Nguyen Duc .
NANOMATERIALS, 2023, 13 (01)
[10]   Integrating nitrogen oxide sensor: A novel concept for measuring low concentrations in the exhaust gas [J].
Geupel, A. ;
Schoenauer, D. ;
Roeder-Roith, U. ;
Kubinski, D. J. ;
Mulla, S. ;
Ballinger, T. H. ;
Chen, H. -Y. ;
Visser, J. H. ;
Moos, R. .
SENSORS AND ACTUATORS B-CHEMICAL, 2010, 145 (02) :756-761