Howe, Jane Y.
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Univ Toronto, Dept Mat Sci & Engn, 184 Coll St, Toronto, ON M5S 3E4, Canada
Hitachi High Technol Canada Inc, Toronto, ON M9W 6A4, Canada
Hitachi High Technol Amer Inc, Nanotechnol Syst Div, 22610 Gateway Ctr Dr,Suite 100, Clarksburg, MD 20871 USA Univ Toronto, Dept Mech & Ind Engn, 5 Kings Coll Rd, Toronto, ON M5S 3G8, Canada