Influence of Fluorine Doping on Hardness and Compressive Stress of the Diamond-Like Carbon Thin Film

被引:3
作者
Aghili, Sayed Mohammad Adel [1 ]
Memarzadeh, Raheleh [1 ]
Lari, Reza Bazargan [1 ]
Eshaghi, Akbar [2 ]
机构
[1] Islamic Azad Univ, Dept Mat Sci & Engn, Marvdasht Branch, Marvdasht 7371113119, Iran
[2] Malek Ashtar Univ Technol, Dept Mat Engn, Esfahan 8315713115, Iran
来源
KOREAN JOURNAL OF MATERIALS RESEARCH | 2023年 / 33卷 / 04期
关键词
fluorine doping; diamond-like carbon; hardness; compressive stress; MECHANICAL-PROPERTIES; DLC COATINGS; F-DLC; DEPOSITION; IMPROVEMENT; SILICON; ALLOY;
D O I
10.3740/MRSK.2023.33.4.124
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This study assessed the influences of fluorine introduced into DLC films on the structural and mechanical properties of the sample. In addition, the effects of the fluorine incorporation on the compressive stress in DLC films were investigated. For this purpose, fluorinated diamond-like carbon (F-DLC) films were deposited on cobalt-chromium-molybdenum substrates using radio-frequency plasma-enhanced chemical vapor. The coatings were examined by Raman scattering (RS), Attenuated total reflectance Fourier transform infrared spectroscopic analysis (ATR-FTIR), and a combination of elastic recoil detection analysis and Rutherford backscattering (ERDA-RBS). Nano-indentation tests were performed to measure hardness. Also, the residual stress of the films was calculated by the Stony equation. The ATR-FTIR analysis revealed that F was present in the amorphous matrix mainly as C-F and C-F2 groups. Based on Raman spectroscopy results, it was determined that F made the DLC films more graphitic. Additionally, it was shown that adding F into the DLC coating resulted in weaker mechanical properties and the F-DLC coating exhibited lower stress than DLC films. These effects were attributed to the replacement of strong C = C by feebler C-F bonds in the F-DLC films. F-doping decreased the hardness of the DLC from 11.5 to 8.8 GPa. In addition, with F addition, the compressive stress of the DLC sample decreased from 1 to 0.7 GPa.
引用
收藏
页码:124 / 129
页数:6
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