Dual-jump amplification in an electric-thermal adjusted arch beam micro-resonator

被引:8
作者
Xiao, Zunhao [1 ,2 ]
Shi, Zhan [1 ,2 ]
Wang, Xuefeng [3 ]
Wei, Xueyong [4 ]
Huan, Ronghua [1 ,2 ]
机构
[1] Zhejiang Univ, Dept Mech, Key Lab Soft Machines & Smart Devices Zhejiang Pro, Hangzhou, Peoples R China
[2] Huanjiang Lab, Zhuji, Peoples R China
[3] Northwestern Polytech Univ, Dept Engn Mech, MIIT Key Lab Dynam & Control Complex Syst, Xian, Peoples R China
[4] Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian, Peoples R China
基金
中国国家自然科学基金;
关键词
Micro-resonator; Nonlinear dynamics; Electric-thermal adjustment; Pre-curved beam; MEMS; BEHAVIOR; SILICON; TRANSDUCTION; MODEL;
D O I
10.1016/j.sna.2023.114925
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Amplitude amplification can improve signal-to-noise ratio, which is of great significance in engineering systems, especially in small-scale MEMS systems. Hesre, we report an approach for achieving amplification of both amplitude and frequency bandwidth using the dual-jump effect in an electric-thermal adjusted arch beam microresonator. Through the electrothermal adjustment of an arch beam body, dual-jump in the amplitude-frequency response is observed, where the amplitude and frequency bandwidth of the response of the nonlinear resonator are both instantly amplified. The amplified frequency bandwidth can be greatly regulated by the driving voltage, which provides a novel strategy for sensing or filter applications capitalizing on the intrinsic nonlinear phenomena of micromechanical resonators.
引用
收藏
页数:8
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