[1] Dalian Univ Technol, Sch Microelect, Dalian 116024, Peoples R China
[2] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab Mat High Power Laser, Shanghai 201800, Peoples R China
[3] UCAS, Hangzhou Inst Adv Study, Sch Phys & Optoelect Engn, Hangzhou 310024, Peoples R China
[4] Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China