Amorphous oxide semiconductors: From fundamental properties to practical applications

被引:36
作者
Lu, Bojing [1 ]
Zhuge, Fei [2 ]
Zhao, Yi [3 ]
Zeng, Yu-Jia [4 ]
Zhang, Liqiang [5 ]
Huang, Jingyun [1 ,6 ]
Ye, Zhizhen [1 ,6 ]
Lu, Jianguo [1 ,6 ,7 ]
机构
[1] Zhejiang Univ, Sch Mat Sci & Engn, State Key Lab Silicon & Adv Semicond Mat, Key Lab Biomed Engn,Minist Educ, Hangzhou 310058, Peoples R China
[2] Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Ningbo 315201, Peoples R China
[3] Zhejiang Univ, Coll Informat Sci & Elect Engn, Hangzhou 310027, Peoples R China
[4] Shenzhen Univ, Coll Phys & Optoelect Engn, Key Lab Optoelect Devices & Syst, Minist Educ & Guangdong Prov, Shenzhen 518060, Peoples R China
[5] Yanshan Univ, Clean Nano Energy Ctr, State Key Lab Metastable Mat Sci & Technol, Qinhuangdao 066004, Peoples R China
[6] Zhejiang Univ, Inst Wenzhou, Wenzhou Key Lab Novel Optoelect & Nano Mat, Wenzhou 325006, Peoples R China
[7] Zhejiang Univ, Sch Mat Sci & Engn, State Key Lab Silicon Mat, Key Lab Biomed Engn,Minist Educ, Hangzhou 310027, Peoples R China
基金
中国国家自然科学基金;
关键词
Indium; -free; Amorphous oxide semiconductors; Thin-film transistors; THIN-FILM TRANSISTORS; GA-DOPED ZNO; ROOM-TEMPERATURE FABRICATION; ACTIVE LAYER THICKNESS; LIGHT-EMITTING-DIODES; LONG-TERM STABILITY; HIGH-PERFORMANCE; ELECTRICAL CHARACTERISTICS; BIAS STABILITY; ELECTRONIC-STRUCTURE;
D O I
10.1016/j.cossms.2023.101092
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Amorphous oxide semiconductors (AOSs) have exceptional features of high visible transparency, high carrier mobility, excellent uniformity, and low-temperature growth process, making them promising in the electronic and information industry. InGaZnO is the most widely studied AOS and has been applied in commercial, which, however, contains rare and precious indium. For sustainable development, a diversity of In-free AOSs have been designed and proposed, which are attracted more and more attention. There have been several reviews on AOSs mainly centred on InGaZnO; in contrast, the review on In-free AOSs is not available at present. In this work, we provide a comprehensive review on In-free AOSs from fundamental properties to practical applications. Various In-free AOSs available in literatures are introduced, with the focus on ZnSnO-based AOSs. Thin-film transistors (TFTs) based on In-free AOSs are investigated in detail, which are the key device for next-generation transparent and flexible displays. Also, the applications in transparent electrodes, sensors, memristors, synaptic devices, and circuits are introduced. This review is expected to provide a guide to well understand the state-of-the-art principles, materials, devices, fabrication, applications, and perspectives of In-free AOSs.
引用
收藏
页数:30
相关论文
共 275 条
[1]   Amorphous Tin Oxide Applied to Solution Processed Thin-Film Transistors [J].
Avis, Christophe ;
Kim, YounGoo ;
Jang, Jin .
MATERIALS, 2019, 12 (20)
[2]   Rail-to-Rail Timing Signals Generation Using InGaZnO TFTs For Flexible X-Ray Detector [J].
Bahubalindruni, Pydi Ganga ;
Tiwari, Bhawna ;
Pereira, Maria ;
Santa, Ana ;
Martins, Jorge ;
Rovisco, Ana ;
Tavares, Vitor ;
Martins, Rodrigo ;
Fortunato, Elvira ;
Barquinha, Pedro .
IEEE JOURNAL OF THE ELECTRON DEVICES SOCIETY, 2020, 8 (01) :157-162
[3]   POLYCRYSTALLINE SILICON THIN-FILM TRANSISTORS [J].
BROTHERTON, SD .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1995, 10 (06) :721-738
[4]   Investigation of low-temperature processed amorphous ZnO TFTs using a sol-gel Method [J].
Chae, Seong Won ;
Yun, Ho Jin ;
Yang, Seung Dong ;
Jeong, Jun Kyo ;
Park, Jung Hyun ;
Kim, Yu Jeong ;
Kim, Hyo Jin ;
Lee, Ga-Won .
Transactions on Electrical and Electronic Materials, 2017, 18 (03) :155-158
[5]   Tuning Electrical Properties in Amorphous Zinc Tin Oxide Thin Films for Solution Processed Electronics [J].
Chandra, R. Devi ;
Rao, Manohar ;
Zhang, Keke ;
Prabhakar, Rajiv Ramanujam ;
Shi, Chen ;
Zhang, Jie ;
Mhaisalkar, Subodh G. ;
Mathews, Nripan .
ACS APPLIED MATERIALS & INTERFACES, 2014, 6 (02) :773-777
[6]   High-performance, spin-coated zinc tin oxide thin-film transistors [J].
Chang, Y. -J. ;
Lee, D. -H. ;
Herman, G. S. ;
Chang, C. -H. .
ELECTROCHEMICAL AND SOLID STATE LETTERS, 2007, 10 (05) :H135-H138
[7]   High-performance hydrogenated amorphous-Si TFT for AMLCD and AMOLED applications [J].
Chen, CW ;
Chang, TC ;
Liu, PT ;
Lu, HY ;
Wang, KC ;
Huang, CS ;
Ling, CC ;
Tseng, TY .
IEEE ELECTRON DEVICE LETTERS, 2005, 26 (10) :731-733
[8]   Bias-induced oxygen adsorption in zinc tin oxide thin film transistors under dynamic stress [J].
Chen, Yu-Chun ;
Chang, Ting-Chang ;
Li, Hung-Wei ;
Chen, Shih-Ching ;
Lu, Jin ;
Chung, Wan-Fang ;
Tai, Ya-Hsiang ;
Tseng, Tseung-Yuen .
APPLIED PHYSICS LETTERS, 2010, 96 (26)
[9]  
Chen-Guan Lee, 2011, 2011 69th Annual Device Research Conference (DRC), P247, DOI 10.1109/DRC.2011.5994517
[10]   Amorphous p-Type CuNiSnO Thin-Film Transistors Processed at Low Temperatures [J].
Cheng, Xiaohan ;
Lu, Bojing ;
Lu, Jianguo ;
Li, Siqin ;
Lu, Rongkai ;
Yue, Shilu ;
Chen, Lingxiang ;
Ye, Zhizhen .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2020, 67 (06) :2336-2341