Improvement and optimization of high-precision accelerometer based on first-order diffraction using single-layer grating

In this paper, a high-precision accelerometer based on single-level diffraction of a single grating is optimized and improved. The sensor consists of an optical system displacement measurement system using grating interferometry and a mechanical structural part made of silicon. The sensor is analyzed by finite element analysis (FEA) and strictly coupled wave analysis methods. The optical accelerometer has an optical sensitivity of 2.21%/mu m over the entire measurement range, and total sensitivity of system is 424%/g (note: 1 g = 9.8 m/s(2)) with and a cross sensitivity of 3.21%. Furthermore, the first-order resonant frequency is 35.995 Hz and the linear measurement range is +/- 0.0177 g. Compared with other low-frequency sensors, a high-performance accelerometer sensor is realized. And can be applied to high-tech fields such as inertial navigation and guidance system, space ocean gravity distribution measurement, and artificial intelligence.