Nonlinear error compensation algorithm for signal resolution of chromatic confocal measurements

被引：9

作者：

Dai, Jiacheng ^{[1
]}

Zeng, Wenhan ^{[2
]}

Zhong, Wenbin ^{[2
]}

Jiang, Xiangqian ^{[2
]}

Lu, Wenlong ^{[1
,3
,4
]}

机构：

[1] Huazhong Univ Sci & Technol HUST, State Key Lab Intelligent Mfg Equipment & Technol, Wuhan 430074, Peoples R China

[2] Univ Huddersfield, Sch Comp & Engn, Ctr Precis Technol, EPSRC Future Metrol Hub, Huddersfield HD1 3DH, England

[3] HUST, Shenzhen Res Inst, Shenzhen 518000, Peoples R China

[4] Opt Valley Lab, Wuhan 430074, Hubei, Peoples R China

来源：

MEASUREMENT | 2024年 / 226卷

基金：

中国国家自然科学基金; 英国工程与自然科学研究理事会;

关键词：

Chromatic confocal; Error compensation; Regression tree model; HEIGHT EXTRACTION; MICROSCOPY;

D O I：

10.1016/j.measurement.2023.114091

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The mechanisms of the nonlinear error, primarily stemming from the deviation of the polynomial model fitting the wavelength-distance mapping relationship in chromatic confocal measurement, have been elucidated. A compensation method is proposed for the nonlinear error, based on a regression tree model. Through calibration experiments using our chromatic confocal sensor, an impressive improvement of over 40 % in precision could be achieved by our proposed compensation method, which advances from +/- 1 mu m to +/- 0.6 mu m within a 4 mm measurement range.

引用

页数：8

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