Reconstruction of high-resolution atomic force microscopy measurements from fast-scan data using a Noise2Noise algorithm

被引:4
作者
Natinsky, Eva [1 ]
Khan, Ryan M. [2 ]
Cullinan, Michael [1 ]
Dingreville, Remi [2 ]
机构
[1] Univ Texas Austin, Austin, TX 78712 USA
[2] Sandia Natl Labs, Ctr Integrated Nanotechnol, Nanostruct Phys Dept, Albuquerque, NM 87185 USA
关键词
Nanometrology; Image reconstruction; Noise2Noise; Machine learning; Atomic force microscopy; SOFTWARE;
D O I
10.1016/j.measurement.2024.114263
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The acquisition of large atomic -force -microscopy (AFM) scans at nanoscale resolutions can take hours and produce datasets with millions of pixels, which is time consuming and computationally expensive to analyze. In this paper, we present an approach to speedup this process by using a computer -vision algorithm, namely the Noise2Noise algorithm, to reconstruct high -resolution, low scan speed AFM data from high-speed, noisy, sparsely sampled AFM data. This algorithm is trained on various noise types to reproduce different sources of experimental noises encountered during the acquisition of AFM data. Our results demonstrate that a sparse, uniform AFM scan of 20 x 20 mu m at 128 x 128 pixel resolution can be processed within seconds, and the output image is comparable to a higher quality raw AFM data scan which required 30 minutes or more to collect and process manually, reducing not only the acquisition and analysis time, but also the size of the data being collected.
引用
收藏
页数:10
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