Defect-Engineered Semiconducting van der Waals Thin Film at Metal-Semiconductor Interface of Field-Effect Transistors

被引:7
|
作者
Kim, Jihyun [1 ]
Rhee, Dongjoon [1 ,2 ]
Jung, Myeongjin [1 ,2 ]
Cheon, Gang Jin [1 ]
Kim, Kangsan [1 ]
Kim, Jae Hyung [1 ]
Park, Ji Yun [1 ]
Yoon, Jiyong [3 ]
Lim, Dong Un [4 ]
Cho, Jeong Ho [4 ]
Kim, In Soo [5 ,6 ]
Son, Donghee [3 ,5 ,6 ]
Jariwala, Deep [2 ]
Kang, Joohoon [1 ,5 ,6 ]
机构
[1] Sungkyunkwan Univ SKKU, Sch Adv Mat Sci & Engn, Suwon 16419, South Korea
[2] Univ Penn, Dept Elect & Syst Engn, Philadelphia, PA 19104 USA
[3] Sungkyunkwan Univ SKKU, Dept Elect & Comp Engn, Suwon 16419, South Korea
[4] Yonsei Univ, Dept Chem & Biomol Engn, Seoul 03722, South Korea
[5] Korea Inst Sci & Technol, Nanophoton Res Ctr, Seoul 02792, South Korea
[6] Sungkyunkwan Univ SKKU, KIST SKKU Carbon Neutral Res Ctr, Suwon 16419, South Korea
基金
新加坡国家研究基金会;
关键词
van der Waals heterostructure; solution processing; interface; defect engineering; multivaluedtransistor; nonvolatile memory;
D O I
10.1021/acsnano.3c10453
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
The significance of metal-semiconductor interfaces and their impact on electronic device performance have gained increasing attention, with a particular focus on investigating the contact metal. However, another avenue of exploration involves substituting the contact metal at the metal-semiconductor interface of field-effect transistors with semiconducting layers to introduce additional functionalities to the devices. Here, a scalable approach for fabricating metal-oxide-semiconductor (channel)-semiconductor (interfacial layer) field-effect transistors is proposed by utilizing solution-processed semiconductors, specifically semiconducting single-walled carbon nanotubes and molybdenum disulfide, as the channel and interfacial semiconducting layers, respectively. The work function of the interfacial MoS2 is modulated by controlling the sulfur vacancy concentration through chemical treatment, which results in distinctive energy band alignments within a single device configuration. The resulting band alignments lead to multiple functionalities, including multivalued transistor characteristics and multibit nonvolatile memory (NVM) behavior. Moreover, leveraging the stable NVM properties, we demonstrate artificial synaptic devices with 88.9% accuracy of MNIST image recognition.
引用
收藏
页码:1073 / 1083
页数:11
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