Development and testing of XY stage compliant mechanism

Precision engineering applications need for compliant micro positioning stages with a wide travel range, high accuracy, and a small footprint. These advantages are provided by monolithic compliant insertion stages, which have been the focus of the majority of earlier research, but they also have the significant drawback that damaged components cannot easily be replaced, necessitating a time-consuming machining process such wire electric discharge machining. A stage with a parallelogram flexure module and a modular design idea is suggested to solve these restrictions. The modular architecture makes it simple to repair damaged components. Large range voice coil actuators (VCA) power the stage. Stiffness matrix-based static and dynamic analytical models are used to assess the stage's performance, and the results of finite element analysis (FEA) are used to check the accuracy of these models. Experimental setup is built to verify the stage performance. The stage offers restricted cross-axis coupling of 15 mu m in other directions to accommodate for nonlinear behaviour, and a translational motion of +/- 7 mm along the working direction. The suggested stage displays a 18 Hz resonance frequency. The results reveal that the modular micro-positioning stage exhibits comparable static and dynamic performances, as well as capability for trajectory tracking, as the monolithic stage.