Flexible Capacitive Pressure Sensor with High Sensitivity and Wide Range Based on a Cheetah Leg Structure via 3D Printing

被引:40
|
作者
Hong, Weiqiang [1 ,2 ,3 ]
Guo, Xiaohui [1 ]
Zhang, Tianxu [1 ]
Zhang, Anqi [1 ]
Yan, Zihao [1 ]
Zhang, Xinyi [1 ]
Li, Xianghui [1 ]
Guan, Yuxin [1 ]
Liao, Dongzhi [1 ]
Lu, Haochen [1 ]
Liu, Hanyu [1 ]
Hu, Jiangtao [1 ]
Niu, Yongzheng [1 ]
Hong, Qi [1 ]
Zhao, Yunong [1 ,4 ]
机构
[1] Anhui Univ, Sch Integrated Circuits, Key Lab Intelligent Comp & Signal Proc, Minist Educ, Hefei 230601, Peoples R China
[2] Dalian Univ Technol, State Key Lab High Performance Precis Mfg, Dalian 116024, Peoples R China
[3] Dalian Univ Technol, Key Lab Micro Nano Technol & Syst Liaoning Prov, Dalian 116024, Peoples R China
[4] Huazhong Univ Sci & Technol, Sch Integrated Circuits, Wuhan 430074, Peoples R China
基金
中国国家自然科学基金; 中国博士后科学基金;
关键词
pressure sensor; bionic structure; high sensitivity; wide range; wearable devices;
D O I
10.1021/acsami.3c09841
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Flexible pressure sensors can be used in human-computer interaction and wearable electronic devices, but one main challenge is to fabricate capacitive sensors with a wide pressure range and high sensitivity. Here, we designed a capacitive pressure sensor based on a bionic cheetah leg microstructure, validated the benefits of the bionic microstructure design, and optimized the structural feature parameters using 3D printing technology. The pressure sensor inspired by the cheetah leg shape has a high sensitivity (0.75 kPa(-1)), a wide linear sensing range (0-280 kPa), a fast response time of roughly 80 ms, and outstanding durability (24,000 cycles). Furthermore, the sensor can recognize a finger-operated mouse, monitor human motion, and transmit Morse code information. This work demonstrates that bionic capacitive pressure sensors hold considerable promise for use in wearable devices.
引用
收藏
页码:46347 / 46356
页数:10
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