High-speed and dynamic measurement of the diffraction efficiency of a grating in a wide wavelength range

被引:1
作者
Wang, Shenghao [1 ]
Wang, Zhendong [2 ]
He, Zhiping [2 ]
机构
[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Precis Opt Mfg & Testing Ctr, Shanghai 201815, Peoples R China
[2] Chinese Acad Sci, Shanghai Inst Tech Phys, Key Lab Space Act Optoelect Technol, Shanghai 200083, Peoples R China
基金
美国国家科学基金会;
关键词
high-speed; dynamic; measurement; grating; diffraction efficiency; FILTER;
D O I
10.1088/1361-6501/acefe8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Approximate 5 min are needed to obtain diffraction efficiency of a grating in a wavelength range with 151 sampling points by the currently widely used measurement technique. The time-consuming nature restricts its usage in many dynamic measurements. To this end, we developed a fast measurement technique, and the corresponding measurement is completed in a high speed within 1 s. Meanwhile, dynamic measurement of the efficiency of a grating from 600 nm to 900 nm during a heating procedure is successfully carried out. Our technique could find applications in other circumstances where high-speed measurement is needed.
引用
收藏
页数:5
相关论文
共 16 条
[1]   Near-infrared detection of flow injection analysis by acoustooptic tunable filter-based spectrophotometry [J].
Baptista, MS ;
Tran, CD ;
Gao, GH .
ANALYTICAL CHEMISTRY, 1996, 68 (06) :971-976
[2]   Diffraction gratings: from principles to applications in high-intensity lasers [J].
Bonod, Nicolas ;
Neauport, Jerome .
ADVANCES IN OPTICS AND PHOTONICS, 2016, 8 (01) :156-199
[3]   Optical characterization of ultrahigh diffraction efficiency gratings [J].
Bunkowski, A. ;
Burmeister, O. ;
Clausnitzer, T. ;
Key, E. -B. ;
Tuennermann, A. ;
Danzmann, K. ;
Schnabel, R. .
APPLIED OPTICS, 2006, 45 (23) :5795-5799
[4]   Polarization-independent broadband beam combining grating with over 98% measured diffraction efficiency from 1023 to 1080 nm [J].
Chen, Junming ;
Zhang, Yibing ;
Wang, Yonglu ;
Kong, Fanyu ;
Huang, Haopeng ;
Wang, Yanzhi ;
Jin, Yunxia ;
Chen, Peng ;
Xu, Jiao ;
Shao, Jianda .
OPTICS LETTERS, 2017, 42 (19) :4016-4019
[5]   Enhanced diffraction efficiency of two-dimensional phase gratings [J].
Graf, Urs U. .
OPTICS EXPRESS, 2018, 26 (25) :32739-32742
[6]   High-spectral-resolution characterization of broadband high-efficiency reflection gratings [J].
He, Kai ;
Wang, Jianpeng ;
Hou, Yongqiang ;
Li, Xu ;
Guan, Heyuan ;
Kong, Fanyu ;
Liu, Shijie ;
Jin, Yunxia ;
Yi, Kui .
APPLIED OPTICS, 2013, 52 (04) :653-658
[7]   Scatterometry-based metrology with feature region signatures matching [J].
Ku, Yi-Sha ;
Wang, Shih-Chun ;
Shyu, Deh-Ming ;
Smith, Nigel .
OPTICS EXPRESS, 2006, 14 (19) :8482-8491
[8]   Precise diffraction efficiency measurements of large-area greater-than-99%-efficient dielectric gratings at the Littrow angle [J].
Lu, Patrick P. ;
Sun, Ke-Xun ;
Byer, Robert L. ;
Britten, Jerald A. ;
Nguyen, Hoang T. ;
Nissen, James D. ;
Larson, Cindy C. ;
Aasen, Michael D. ;
Carlson, Thomas C. ;
Hoaglan, Curly R. .
OPTICS LETTERS, 2009, 34 (11) :1708-1710
[9]   Double-groove rectangular gratings for high-efficiency wideband vertical coupling in planar-integrated optical systems [J].
Ma, Guoqing ;
Zhou, Changhe ;
Xie, Yongfang ;
Jin, Ge ;
Zhu, Rongwei ;
Zhang, Jin ;
Yu, Junjie ;
Situ, Guohai .
CHINESE OPTICS LETTERS, 2022, 20 (09)
[10]   Measuring method of diffraction efficiency for plane grating based on Fourier spectral technology [J].
Ma, Zhenyu ;
Qi, Xiangdong ;
Li, Xiaotian ;
Zhang, Shanwen ;
Bayanheshig ;
Yu, Hongzhu ;
Yu, Haili ;
Jiao, Qingbin .
APPLIED OPTICS, 2016, 55 (03) :522-528