Physics, Structures, and Applications of Fluorite-Structured Ferroelectric Tunnel Junctions

被引:24
作者
Hwang, Junghyeon [1 ]
Goh, Youngin [1 ]
Jeon, Sanghun [1 ]
机构
[1] Korea Adv Inst Sci & Technol KAIST, Sch Elect Engn, 291 Daehak Ro, Daejeon 34141, South Korea
关键词
ferroelectric tunnel junctions; fluorite structures; Hafnia; neuromorphic devices; non-volatile memory; transport mechanism; MEMORY; MEMRISTOR; FET; ELECTRORESISTANCE; INTEGRATION; CAPACITORS; CHANNEL; FILMS;
D O I
10.1002/smll.202305271
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
The interest in ferroelectric tunnel junctions (FTJ) has been revitalized by the discovery of ferroelectricity in fluorite-structured oxides such as HfO2 and ZrO2. In terms of thickness scaling, CMOS compatibility, and 3D integration, these fluorite-structured FTJs provide a number of benefits over conventional perovskite-based FTJs. Here, recent developments involving all FTJ devices with fluorite structures are examined. The transport mechanism of fluorite-structured FTJs is explored and contrasted with perovskite-based FTJs and other 2-terminal resistive switching devices starting with the operation principle and essential parameters of the tunneling electroresistance effect. The applications of FTJs, such as neuromorphic devices, logic-in-memory, and physically unclonable function, are then discussed, along with several structural approaches to fluorite-structure FTJs. Finally, the materials and device integration difficulties related to fluorite-structure FTJ devices are reviewed. The purpose of this review is to outline the theories, physics, fabrication processes, applications, and current difficulties associated with fluorite-structure FTJs while also describing potential future possibilities for optimization.
引用
收藏
页数:22
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