A Valveless Piezoelectric Micropump with Flexure Connection Structure

被引：1

作者：

Ni, Jiafeng ^{[1
]}

Xuan, Weipeng ^{[1
]}

Li, Yilin ^{[1
]}

Huang, Xiwei ^{[1
]}

Li, Wenjun ^{[1
]}

Jin, Hao ^{[2
,3
]}

Dong, Shurong ^{[2
,3
]}

Luo, Jikui ^{[2
,3
]}

机构：

[1] Hangzhou Dianzi Univ, Minist Educ, Zhejiang Key Lab Large Scale Integrated Circuit D, Key Lab RF Circuits & Syst,Coll Elect & Info, Hangzhou, Peoples R China

[2] Zhejiang Univ, Key Lab Adv Micro Nano Elect Dev & Smart Syst Zhe, Coll Info Sci & Elect Engn, Hangzhou, Peoples R China

[3] Zhejiang Univ, Int Joint Innovat Ctr, Haining, Peoples R China

来源：

2023 IEEE 23RD INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY, NANO | 2023年

基金：

国家重点研发计划; 中国国家自然科学基金;

关键词：

PUMP;

D O I：

10.1109/NANO58406.2023.10231265

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This work reports a valveless piezoelectric micropump with high pressure load and high flowrate. The experimental results showed that the maximum displacement of the actuator and the output flowrate of the micropump could reach 18.4 mu m and 308 mL/min under zero pressure load, respectively, which was highly consistent with the numerical analysis. The maximum output pressure reached 47 kPa, and the pump was extremely stable under various temperatures from room temperature to 80 degrees C, with frequency variations of only -150 Hz. The micropump demonstrated its great potential for wearable/portable application, especially for blood pressure monitoring.

引用

收藏

页码：777 / 780

页数：4

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