Laser-Carbonization - A Powerful Tool for Micro-Fabrication of Patterned Electronic Carbons

被引:49
|
作者
Devi, Mamta [1 ]
Wang, Huize [2 ]
Moon, Sanghwa [2 ]
Sharma, Swati [1 ]
Strauss, Volker [2 ]
机构
[1] Indian Inst Technol Mandi, Sch Mech & Mat Engn, Kamand 175075, Himachal Prades, India
[2] Max Planck Inst Colloids & Interfaces, Dept Kolloidchem, Muhlenberg 1, D-14476 Potsdam, Germany
关键词
antennas; electrocatalysis; laser-carbonization; microelectronics; sensors; supercapacitors; INDUCED GRAPHENE; GLASSY-CARBON; ELECTRICAL-CONDUCTIVITY; HIGH-PERFORMANCE; POROUS CARBON; INDUCED GRAPHITIZATION; MECHANICAL-PROPERTIES; FUNCTIONAL-GROUPS; DOPED GRAPHENE; STRAIN SENSOR;
D O I
10.1002/adma.202211054
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Fabricating electronic devices from natural, renewable resources is a common goal in engineering and materials science. In this regard, carbon is of special significance due to its biocompatibility combined with electrical conductivity and electrochemical stability. In microelectronics, however, carbon's device application is often inhibited by tedious and expensive preparation processes and a lack of control over processing and material parameters. Laser-assisted carbonization is emerging as a tool for the precise and selective synthesis of functional carbon-based materials for flexible device applications. In contrast to conventional carbonization via in-furnace pyrolysis, laser-carbonization is induced photo-thermally and occurs on the time-scale of milliseconds. By careful selection of the precursors and process parameters, the properties of this so-called laser-patterned carbon (LP-C) such as porosity, surface polarity, functional groups, degree of graphitization, charge-carrier structure, etc. can be tuned. In this critical review, a common perspective is generated on laser-carbonization in the context of general carbonization strategies, fundamentals of laser-induced materials processing, and flexible electronic applications, like electrodes for sensors, electrocatalysts, energy storage, or antennas. An attempt is made to have equal emphasis on material processing and application aspects such that this emerging technology can be optimally positioned in the broader context of carbon-based microfabrication.
引用
收藏
页数:38
相关论文
共 50 条
  • [1] Laser-Carbonization - A Powerful Tool for Micro-Fabrication of Patterned Electronic Carbons (vol 35, 2211054, 2023)
    Devi, Mamta
    Wang, Huize
    Moon, Sanghwa
    Sharma, Swati
    Strauss, Volker
    ADVANCED MATERIALS, 2024, 36 (38)
  • [2] Laser-carbonization: Peering into the formation of micro-thermally produced (N-doped)carbons
    Wang, Huize
    Delacroix, Simon
    Osswald, Oliver
    Anderson, Mackenzie
    Heil, Tobias
    Lepre, Enrico
    Lopez-Salas, Nieves
    Kaner, Richard B.
    Smarsly, Bernd
    Strauss, Volker
    CARBON, 2021, 176 : 500 - 510
  • [3] Electronic micro-fabrication of chalcogenide glass
    Tanaka, K
    PHYSICS AND APPLICATIONS OF NON-CRYSTALLINE SEMICONDUCTORS IN OPTOELECTRONICS, 1997, 36 : 31 - 44
  • [4] Micro-fabrication by femtosecond laser pulses
    Li, YD
    Tian, JG
    Sun, Q
    2ND INTERNATIONAL CONFERENCE ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: ADVANCED OPTICAL MANUFACTURING TECHNOLOGIES, 2006, 6149
  • [5] Study of Nanosecond Pulse Laser Micro-Fabrication
    Liu, Chunyang
    Fu, Xing
    Wu, Yong
    Sun, Fengming
    Hu, Xiaotang
    MICRO AND NANO TECHNOLOGY, 2009, 60-61 : 151 - 154
  • [6] Laser Micro-fabrication in RF MEMS Switches
    Chen Jimin
    Yin Yuehua
    2009 13TH INTERNATIONAL SYMPOSIUM ON ANTENNA TECHNOLOGY AND APPLIED ELECTROMAGNETICS AND THE CANADIAN RADIO SCIENCES MEETING (ANTEM/URSI 2009), 2009, : 65 - 69
  • [7] Laser micro-fabrication/manipulation of dielectric materials
    Misawa, H
    Juodkazis, S
    Marcinkevicius, A
    Mizeikis, V
    Yamaguchi, A
    Sun, HB
    Matsuo, S
    MHS 2000: PROCEEDINGS OF THE 2000 INTERNATIONAL SYMPOSIUM ON MICROMECHATRONICS AND HUMAN SCIENCE, 2000, : 23 - 33
  • [8] MICRO-FABRICATION OF CERAMIC USING LASER ENHANCED ETCHING
    MITSUHASHI, M
    OTSUKA, Y
    TAGAWA, N
    BULLETIN OF THE JAPAN SOCIETY OF PRECISION ENGINEERING, 1989, 23 (02): : 100 - 104
  • [9] Micro-fabrication assisted by laser trapped micro-particle tools
    Bai, J
    Zhu-Ge, ZR
    Wang, XN
    Hou, XY
    Yang, GG
    MEMS/MOEMS TECHNOLOGIES AND APPLICATIONS II, 2004, 5641 : 219 - +
  • [10] On the characteristics of Si micro-fabrication by direct etching of excimer laser
    Yuan, Weizheng
    Ma, Binghe
    Li, Xiaoying
    Li, Tiejun
    Wang, Lige
    Liu, Jingru
    Jixie Gongcheng Xuebao/Chinese Journal of Mechanical Engineering, 2000, 36 (03): : 107 - 110