Fabrication and characterization of hybrid bulk and surface acoustic wave resonators with Ag/patterned-AlN/Mo/diamond/Si layered structure

被引：3
作者：
Xie, Bowei
Ding, Fazhu [1 ]
Shang, Hongjing
Huang, Daxing
Zou, Qi
Li, Congmeng
Gu, Hongwei [1 ]
机构：
[1] Chinese Acad Sci, Key Lab Appl Superconduct, Beijing 100190, Peoples R China
来源：
DIAMOND AND RELATED MATERIALS | 2023年 / 134卷
基金：
北京市自然科学基金; 中国国家自然科学基金;
关键词：
Diamond substrate; Acoustic coupling; Hybrid BAW; SAW; Piezoelectric inter-digital transducer; ALN THIN-FILMS; SAW FILTERS; NANOCRYSTALLINE DIAMOND; HIGH-VELOCITY; DEVICES;
D O I：
10.1016/j.diamond.2023.109769
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Hybrid bulk acoustic wave and surface acoustic wave (BAW/SAW) devices attract extensive interests due to their high electromechanical coupling coefficient and quality factor. In this study, longitudinal BAW coupled SAW resonators with piezoelectric AlN inter-digital transducers (IDT) were simulated and fabricated on diamond substrates to increase the working frequency as well. The simulated figure of merit value is 104, 123 % improved comparing with the corresponding metal IDT of 46.5. The frequency response spectrum of single port reflection (S11) shows dominant harmonic resonance at 913 MHz with electromechanical coupling coefficient of 2.16 % and quality factor of 913. These results indicate mutual transductions between BAW and SAW occur with suf-ficient efficiency in hybrid structures, which is analyzed and interpreted by equivalent acoustic impedance theory.
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页数：6
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