Improvement of the magnetic properties of Nd-Fe-B/glass two-layer films deposited on Si substrates

被引：2

作者：

Nakano, M. ^{[1
]}

Higuchi, K. ^{[1
]}

Yamaguchi, H. ^{[1
]}

Fukuda, I. ^{[1
]}

Yamashita, A. ^{[1
]}

Yanai, T. ^{[1
]}

Shinshi, T. ^{[2
]}

Fukunaga, H. ^{[1
]}

机构：

[1] Nagasaki Univ, Grad Sch Engn, Nagasaki 8528521, Japan

[2] Tokyo Inst Technol, Inst Innovat Res, Lab Future Interdisciplinary Res Sci & Technol, Yokohama 2268503, Japan

来源：

AIP ADVANCES | 2023年 / 13卷 / 02期

关键词：

Compendex;

D O I：

10.1063/9.0000599

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

In a previous study, the authors developed Nd-Fe-B/glass two-layer films deposited on Si substrates using pulsed laser deposition for micro electro mechanical systems. Here, the fabrication conditions of the films were investigated to determine the optimum conditions that enhance the magnetic properties of the films. The annealing time in the pulse-annealing process conducted after the deposition was set to 4.0 s at Nd contents of 14 at.-16 at.%. Moreover, the effect of the glass/Nd-Fe-B thickness ratio on the magnetic properties was examined. A ratio less than 2 resulted in an increase in (BH)(max) up to 80 kJ/m(3). (c) 2023 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). https://doi.org/10.1063/9.0000599

引用

页数：4