Heterogeneous integration of lithium tantalate thin film on quartz for high performance surface acoustic wave resonator

被引：7
作者：
Chen, Yang [1 ,2 ]
Wu, Jinbo [1 ,2 ,3 ]
Zhao, Xiaomeng [1 ]
Li, Zhongxu [1 ,2 ]
Ke, Xinjian [1 ,2 ]
Zhang, Shibin [1 ]
Zhou, Min [1 ]
Huang, Kai [1 ]
Ou, Xin [1 ,2 ]
机构：
[1] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China
[2] Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
[3] ShanghaiTech Univ, Sch Informat Sci & Technol SIST, Shanghai 201210, Peoples R China
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 2023年 / 62卷 / 01期
基金：
国家重点研发计划;
关键词：
LTOQ; SAW resonator; ion-cut; piezo thin film; heterogenous substrate; SUBSTRATE; NIOBATE; DESIGN;
D O I：
10.35848/1347-4065/aca5d7
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Surface acoustic wave (SAW) resonator based on the piezo film on a foreign substrate is promising to enhance the performance of radio frequency filters. In this work, the 4 inch wafer-scale lithium tantalate thin film on quartz (LTOQ) heterogenous substrate was fabricated by ion-cut process. The cut angle of quartz was optimized to achieve high-quality factor (Q) based on finite element analysis. The average film thickness and the film nonuniformity for the whole wafer are 602 nm and +/- 2.2%, respectively. The lithium tantalate film exhibits single-crystalline quality where the full width at half-maximum of high-resolution X-ray diffraction rocking curve is 47.4 arcsec. The shear horizonal surface acoustic wave resonator based on the LTOQ structure exhibits a maximum Bode-Q exceeding 3000 and the electromechanical coupling coefficient of 10.26%. The temperature coefficient of frequency at resonant frequency and anti-resonant frequency are -25.21 ppm degrees C-1 and -35.22 ppm degrees C-1, respectively.
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页数：7
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