共 50 条
- [4] SrTa2O6 thin films deposited by plasma-enhanced atomic layer deposition JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2001, 40 (12): : 6941 - 6944
- [5] SrTa2O6 thin films deposited by plasma-enhanced atomic layer deposition Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 2001, 40 (12): : 6941 - 6944
- [6] Hydrogen plasma-enhanced atomic layer deposition of copper thin films JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2007, 25 (06): : 2581 - 2585
- [9] Plasma-enhanced atomic layer deposition of Ir thin films for copper adhesion layer SURFACE & COATINGS TECHNOLOGY, 2011, 205 (21-22): : 5009 - 5013