Contrastive deep clustering for detecting new defect patterns in wafer bin maps

被引:3
作者
Baek, Insung [1 ]
Kim, Seoung Bum [1 ]
机构
[1] Korea Univ, Sch Ind & Management Engn, Seoul 02841, South Korea
关键词
Semiconductor manufacturing; Wafer bin map; Deep clustering; New defect pattern classification; Contrastive learning; Deep learning; CONVOLUTIONAL NEURAL-NETWORK; CLASSIFICATION; RECOGNITION;
D O I
10.1007/s00170-023-12939-0
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
Wafer bin maps (WBMs) data, presented as images, play a critical role in identifying defects in the semiconductor industry. Thus, accurately classifying WBM defect patterns is essential to maintain high quality and enhance the overall yield. However, the task of labeling and classifying WBM data, which are generated daily in the tens of thousands or more, presents a challenge for experts. Recently, with advancements in artificial intelligence research, there has been a surge in efforts to automatically classify WBM defect patterns. Nevertheless, existing studies have primarily focus on classifying known defect patterns using labels. However, in the real-world semiconductor industry, new defect patterns are constantly emerging in addition to the known patterns. In this study, we propose the contrastive deep clustering (CODEC) for wafer bin maps that identifies new defective patterns in WBMs while simultaneously clustering these patterns into multiple defects without using labels. We use a contrastive loss function to address the challenges associated with a limited number of novel defect patterns. We demonstrate the effectiveness of our proposed methodology in accurately classifying new defect patterns using open data WM-811 k.
引用
收藏
页码:3561 / 3571
页数:11
相关论文
共 31 条
  • [1] A state-of-the-art review of ductile cutting of silicon wafers for semiconductor and microelectronics industries
    Arif, Muhammad
    Rahman, Mustafizur
    San, Wong Yoke
    [J]. INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2012, 63 (5-8) : 481 - 504
  • [2] Chen X., 2020, PREPRINT, DOI DOI 10.48550/ARXIV.2003.04297
  • [3] Recognition of unknown wafer defect via optimal bin embedding technique
    Chu, MinSik
    Park, Seongmi
    Jeong, Jiin
    Joo, Kyonghee
    Lee, Yongyeol
    Kang, Jihoon
    [J]. INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2022, 121 (5-6) : 3439 - 3451
  • [4] Grill Jean-Bastien, 2006, ARXIV, P07733
  • [5] Multi-stage Deep Classifier Cascades for Open World Recognition
    Guo, Xiaojie
    Alipour-Fanid, Amir
    Wu, Lingfei
    Purohit, Hemant
    Chen, Xiang
    Zeng, Kai
    Zhao, Liang
    [J]. PROCEEDINGS OF THE 28TH ACM INTERNATIONAL CONFERENCE ON INFORMATION & KNOWLEDGE MANAGEMENT (CIKM '19), 2019, : 179 - 188
  • [6] Guo XF, 2017, PROCEEDINGS OF THE TWENTY-SIXTH INTERNATIONAL JOINT CONFERENCE ON ARTIFICIAL INTELLIGENCE, P1753
  • [7] Momentum Contrast for Unsupervised Visual Representation Learning
    He, Kaiming
    Fan, Haoqi
    Wu, Yuxin
    Xie, Saining
    Girshick, Ross
    [J]. 2020 IEEE/CVF CONFERENCE ON COMPUTER VISION AND PATTERN RECOGNITION (CVPR 2020), 2020, : 9726 - 9735
  • [8] Deep Semantic Clustering by Partition Confidence Maximisation
    Huang, Jiabo
    Gong, Shaogang
    Zhu, Xiatian
    [J]. 2020 IEEE/CVF CONFERENCE ON COMPUTER VISION AND PATTERN RECOGNITION (CVPR 2020), 2020, : 8846 - 8855
  • [9] Learning Representation for Clustering Via Prototype Scattering and Positive Sampling
    Huang, Zhizhong
    Chen, Jie
    Zhang, Junping
    Shan, Hongming
    [J]. IEEE TRANSACTIONS ON PATTERN ANALYSIS AND MACHINE INTELLIGENCE, 2023, 45 (06) : 7509 - 7524
  • [10] Decision fusion approach for detecting unknown wafer bin map patterns based on a deep multitask learning model
    Jang, Jaeyeon
    Lee, Gyeong Taek
    [J]. EXPERT SYSTEMS WITH APPLICATIONS, 2023, 215