Ferroelectric YAlN grown by molecular beam epitaxy

被引:28
|
作者
Wang, Ding [1 ]
Mondal, Shubham [1 ]
Liu, Jiangnan [1 ]
Hu, Mingtao [1 ]
Wang, Ping [1 ]
Yang, Samuel [1 ]
Wang, Danhao [1 ]
Xiao, Yixin [1 ]
Wu, Yuanpeng [1 ]
Ma, Tao [2 ]
Mi, Zetian [1 ]
机构
[1] Univ Michigan, Dept Elect Engn & Comp Sci, Ann Arbor, MI 48109 USA
[2] Univ Michigan, Michigan Ctr Mat Characterizat MC 2, Ann Arbor, MI 48109 USA
基金
美国国家科学基金会;
关键词
701.1 Electricity: Basic Concepts and Phenomena - 712.1 Semiconducting Materials - 741.3 Optical Devices and Systems - 804.1 Organic Compounds - 804.2 Inorganic Compounds - 931.3 Atomic and Molecular Physics - 933.1.2 Crystal Growth;
D O I
10.1063/5.0159562
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report the demonstration of ferroelectric switching in yttrium (Y)-doped nitride semiconductors. In this study, single-crystalline, wurtzite Y0.07Al0.93N films were epitaxially grown on GaN/sapphire templates by plasma-assisted molecular beam epitaxy. The ferroelectric switching process has been investigated by current density-electric field (J-E) and polarization-electric field (P-E) loops as well as positive-up-negative-down measurements, showing a coercive field of similar to 6 MV/cm and a switchable polarization of similar to 130 mu C/cm(2). Ferroelectric switching was further confirmed via butterfly shape capacitance-voltage (C-V) loops and polarity-sensitive wet etching. The realization of ferroelectric, Y-doped AlN films further extends the family of nitride ferroelectrics and unravels a wealth of intriguing opportunities in III-nitride based electronic, piezo-electronic, and optoelectronic devices.
引用
收藏
页数:6
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