Effect of Substrate Bias Voltage on Microstructure and Mechanical Properties of Cr-Nb-Ti-Zr-N-O Ceramic Thin Films Produced by Reactive Sputtering

被引:3
作者
Ataie, Sayed Alireza [1 ]
Qashqay, S. Mahmoudi [2 ]
Zamani-Meymian, Mohammad Reza [2 ]
Ferreira, Fabio [3 ,4 ]
机构
[1] Iran Univ Sci & Technol IUST, Sch Met & Mat Engn, Tehran 1684613114, Iran
[2] Iran Univ Sci & Technol IUST, Phys Dept, Tehran 1684613114, Iran
[3] Univ Coimbra, Dept Mech Engn, ARISE, CEMMPRE, Rua Luis Reis St, P-3030788 Coimbra, Portugal
[4] Inst Pedro Nunes, Lab Ensaios Desgaste & Mat, LED&Mat IPN, Rua Pedro Nunes, P-3030199 Coimbra, Portugal
关键词
thin film; ceramic coating; fractal parameters; indentation; scratch; TARGET POWER; COATINGS; HARDNESS; GROWTH;
D O I
10.3390/coatings13071141
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Hard coatings are applied in various applications to protect substrates from wear and corrosion. In the present study, multi-element ceramic films are deposited by reactive sputtering. The level of substrate bias voltage (-50, -125 and -200 V) is changed to investigate the structural and mechanical properties of Cr-Nb-Ti-Zr-N thin films. Chemical analysis (using EDS, XRD and Raman spectroscopy) reveals that these thin films (with a high amount of oxygen) are composed of a nanocomposite phase structure (amorphous and nano-crystalline phases). CrO2 and NbxN crystalline phases exist in an amorphous matrix in the coatings. By increasing the substrate voltage (from -50 to -200 V), the nitrogen content (from 30 to 40 at. %) increases, and CrxN crystalline phases are generated in S125 and S200. Morphological, topological and image analysis (employing FESEM and AFM) data show that the intermediate level of substrate bias voltage (sample S125) can produce a uniform surface with minimum defect density (15%). In addition, S125 has the minimum level of roughness (16.6 nm), skewness (0.2) and kurtosis (2.8). Therefore, the hardness, toughness and wear resistance (extracted from indentation and scratch tests) of this sample is maximum (H is 24.5 GPa and H/E is 0.107), while sample S50 shows complete fracture and delamination.
引用
收藏
页数:15
相关论文
共 49 条
[21]   Structural, mechanical and thermal properties of CrAlNbN coatings [J].
Hu, Chun ;
Xu, Yu X. ;
Chen, Li ;
Pei, Fei ;
Zhang, Li J. ;
Du, Yong .
SURFACE & COATINGS TECHNOLOGY, 2018, 349 :894-900
[22]   Synthesis and characterization of CrZrAlN films using unbalanced magnetron sputtering with segment targets [J].
Kim, Dong Jun ;
Kim, Sung Min ;
La, Joung Hyun ;
Lee, Sang Yul ;
Hong, Yeh Sun ;
Lee, Min Hyung .
METALS AND MATERIALS INTERNATIONAL, 2013, 19 (06) :1295-1299
[23]   A review of the intrinsic ductility and toughness of hard transition-metal nitride alloy thin films [J].
Kindlund, H. ;
Sangiovanni, D. G. ;
Petrov, I ;
Greene, J. E. ;
Hultman, L. .
THIN SOLID FILMS, 2019, 688
[24]   Contact analysis of non-Gaussian surfaces for minimum static and kinetic friction and wear [J].
Kotwal, CA ;
Bhushan, B .
TRIBOLOGY TRANSACTIONS, 1996, 39 (04) :890-898
[25]   Influence of substrate temperature on the crystalline quality of AlN layers deposited by RF reactive magnetron sputtering [J].
Kumada, Tomoyuki ;
Ohtsuka, Makoto ;
Fukuyama, Hiroyuki .
AIP ADVANCES, 2015, 5 (01)
[26]   Determining role of W+ ions in the densification of TiAlWN thin films grown by hybrid HiPIMS/DCMS technique with no external heating [J].
Li, Xiao ;
Petrov, Ivan ;
Hultman, Lars ;
Greczynski, Grzegorz .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2023, 41 (01)
[27]   Microstructure, mechanical properties and lead-bismuth eutectic corrosion behavior of (AlCrFeTiMo)NO and (AlCrFeTiNb)NO high entropy metal sublattice ceramic coatings [J].
Lyu, Liangliang ;
Yang, Jian ;
Zhou, Mingyang ;
Yan, Mingyu ;
Yang, Jijun .
VACUUM, 2023, 209
[28]   Electrochemical behavior of TiN, CrN and TiN/CrN nanostructured coatings on the nickel-chromium alloy used in dental fixed prosthesis [J].
Mansoor, Nidhal Sahib ;
Fattah-alhosseini, Arash ;
Elmkhah, Hassan ;
Shishehian, Arash .
JOURNAL OF ASIAN CERAMIC SOCIETIES, 2020, 8 (03) :694-710
[29]   The Additions of V and Cu on the Microstructure and Mechanical Properties of Mo-N Coatings [J].
Mei, Haijuan ;
Cai, Zhenhao ;
Ding, Jicheng ;
Yan, Kai ;
Li, Qiuguo ;
Zhao, Zhenting ;
Zhao, Junfeng ;
Cheng, Lixia ;
Liu, Min ;
Gong, Weiping .
COATINGS, 2022, 12 (08)
[30]   Precipitation-based grain boundary design alters Inter- to Trans-granular Fracture in AlCrN Thin Films [J].
Meindlhumer, M. ;
Ziegelwanger, T. ;
Zalesak, J. ;
Hans, M. ;
Loefler, L. ;
Spor, S. ;
Jaeger, N. ;
Stark, A. ;
Hruby, H. ;
Daniel, R. ;
Holec, D. ;
Schneider, J. M. ;
Mitterer, C. ;
Keckes, J. .
ACTA MATERIALIA, 2022, 237