Convective heat transfer across silicon rods under uniform wall heat flux in a laboratory-scale Siemens reactor

被引:4
作者
Chen, Fengyang [1 ]
Hou, Yanqing [1 ]
Zhao, Dan [1 ]
Yang, Ni [2 ]
Ma, Wenhui [1 ]
Xie, Gang [1 ,2 ]
机构
[1] Kunming Univ Sci & Technol, State Key Lab Complex Nonferrous Met Resources Cle, Kunming 650093, Yunnan, Peoples R China
[2] State Key Lab Adv Met Nonferrous Met, Kunming 650051, Peoples R China
基金
中国国家自然科学基金;
关键词
Convective heat transfer; Siemens reactor; Dimensionless parameter; Polysilicon; Heat flux; CVD REACTOR; ELECTRICAL BEHAVIOR; MODEL; DEPOSITION; GROWTH; POWER; MODULE; RADIUS; PV;
D O I
10.1016/j.csite.2023.103623
中图分类号
O414.1 [热力学];
学科分类号
摘要
The effects of operating and geometric parameters on convective heat transfer (CHT) in Siemens reactor with a laboratory-scale are investigated. A dimensionless analysis of the CHT is performed considering the flow characteristics, rod diameter (d), rod length (L), number of rods, and the distance between adjacent silicon rods. A dimensionless parameter (Hou) is proposed to represent the number of rods and the distance between adjacent rods. Additionally, three dimensionless parameters that affect the CHT, namely, the Rayleigh number, d/L, and Hou, are obtained. The two-factor interaction effects of the dimensionless parameters on the CHT are analyzed, and their relationships are determined for calculating the CHT flux. Based on these relationships, the Nusselt number is calculated for 7-and 8-rod laboratory-scale Siemens reactors, and the relative errors between the predicted and calculated results are 1.4 and 3.2 %, respectively.
引用
收藏
页数:17
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