Characterization of Doped ZnO Thin Film for Ammonia Gas Sensing Application

被引:0
|
作者
Johari, S. [1 ,2 ]
Hasbullah, F. A. [1 ]
Rosman, A. S. [1 ]
Ramli, M. M. [1 ,2 ]
Ahmad, M. F. [1 ,2 ]
Karim, N. A. [2 ]
Osman, N. H. [3 ]
Darminto, D. [4 ]
Reshak, A. H. [5 ,6 ]
Garus, S. [7 ]
机构
[1] Univ Malaysia Perlis, Fac Elect Engn & Technol, Pauh Putra Campus, Arau 02600, Perlis, Malaysia
[2] Univ Malaysia Perlis, Inst Nano Elect Engn, Kangar 01000, Perlis, Malaysia
[3] Univ Putra Malaysia UPM, Dept Phys, Appl Electromagnet Lab 1, Fac Sci, Upm Serdang 43400, Selangor, Malaysia
[4] Inst Teknol Sepuluh Nopember, Fac Sci & Data Analyt, Dept Phys, Campus ITS Sukolilo, Surabaya 60111, Indonesia
[5] Univ Basrah, Coll Sci, Phys Dept, Basrah 61004, Iraq
[6] Czech Tech Univ, Dept Instrumentat & Control Engn, Fac Mech Engn, Prague 616607, Czech Republic
[7] Czestochowa Tech Univ, Fac Mech Engn & Comp Sci, Dept Mech & Fundamentals Machinery Design, Dabrowskiego 73, PL-42201 Czestochowa, Poland
关键词
gas sensor; semiconductor; ammonia; doped ZnO thin films; SELECTIVITY;
D O I
10.12693/APhysPolA.144.379
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
This paper reports on the characterization of Sn- and Al-doped zinc oxide thin film for potential ammonia gas detection. The sol-gel method has been used to deposit the dopant onto the glass substrate at an annealing temperature of 500 degrees C for three different doping concentrations, which are 0.5, 1.0, and 1.5 at.%. The method used to produce this thin film is sol-gel, as it is cheap, easy, and can be employed at low temperatures. The studies involve the investigation of the morphological structures and electrical and optical properties of doped ZnO. In terms of structural properties, scanning electron microscope images of Sn- and Al-doped ZnO change as the dopant concentration is increased. The doped thin film response and recovery towards 200 ppm of ammonia were observed and recorded. Both dopants show good gas sensing response. The recorded resistance reading suggests that Al is the superior dopant in gas sensing as it produces a low resistance reading of 230 Omega as opposed to 140 k Omega produced by Sn-doped ZnO thin film.
引用
收藏
页码:379 / 382
页数:4
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