A single micro-LED manipulation system based on micro-gripper

被引:1
作者
Bai, Jie [1 ]
Niu, Pingjuan [2 ]
Gu, Erdan [3 ]
Li, Jianming [4 ]
Tee, Clarence Augustine T. H. [5 ]
机构
[1] Tiangong Univ, Sch Mech Engn, Tianjin 300387, Peoples R China
[2] Tiangong Univ, Sch Elect & Informat Engn, Tianjin 300387, Peoples R China
[3] Univ Strathclyde, Inst Photon, Glasgow G1 1RD, Scotland
[4] Tianjin Aerosp Electromech Equipment Res Inst, Tianjin Key Lab Micro Low Grav Environm Simulat Te, Tianjin 300458, Peoples R China
[5] Zhejiang Normal Univ, Sch Phys & Elect Informat Engn, Dept Elect & Informat Engn, Jinhua 321004, Peoples R China
关键词
Micro-gripper; Micro-LED; Transfer printing; Manipulation; LIGHT-EMITTING-DIODES; ADHESION;
D O I
10.1063/10.0024319
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Micro-LEDs (mu LEDs) have advantages in terms of brightness, power consumption, and response speed. In addition, they can also be used as micro-sensors implanted in the body via flexible electronic skin. One of the key techniques involved in the fabrication of mu LED-based devices is transfer printing. Although numerous methods have been proposed for transfer printing, improving the yield of mu LED arrays is still a formidable task. In this paper, we propose a novel method for improving the yield of mu LED arrays transferred by the stamping method, using an innovative design of piezoelectrically driven asymmetric micro-gripper. Traditional grippers are too large to manipulate mu LEDs, and therefore two micro-sized cantilevers are added at the gripper tips. A mu LED manipulation system is constructed based on the micro-gripper together with a three-dimensional positioning system. Experimental results using this system show that it can be used successfully to manipulate mu LED arrays.
引用
收藏
页数:8
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