Enhanced toluene gas-sensing properties of MEMS sensor based on Pt-loaded SnO2 nanoparticles

被引：13

作者：

Liu, Xiaofan ^{[1
]}

Zhao, Jian ^{[2
]}

Wang, Yongguang ^{[1
]}

Hu, Yan ^{[3
]}

Xu, Linjie ^{[1
]}

Yao, Longchao ^{[1
]}

Zheng, Chenghang ^{[1
]}

Yang, Jian ^{[1
]}

Gao, Xiang ^{[1
]}

机构：

[1] Zhejiang Univ, State Environm Protect Engn Ctr forCoal Fired Air, State Key Lab Clean Energy Utilizat, Hangzhou 310027, Peoples R China

[2] Zhejiang Hope Environm Protect Engn Co Ltd, Hangzhou 310012, Peoples R China

[3] Zhejiang Univ, Ningbo Innovat Ctr, Ningbo 315100, Peoples R China

来源：

NANOTECHNOLOGY | 2023年 / 34卷 / 36期

基金：

中国国家自然科学基金;

关键词：

toluene; gas sensor; MEMS; Pt-loaded SnO2; ONE-STEP SYNTHESIS; LOW-TEMPERATURE; HYDROTHERMAL SYNTHESIS; FLAMMABILITY LIMITS; FAST-RESPONSE; PERFORMANCE; NANOWIRES; BENZENE; AU; MICROSPHERES;

D O I：

10.1088/1361-6528/acdbd3

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Rapid detection of low concentration toluene is highly desirable in environment monitoring, industrial processes, medical diagnosis, etc. In this study, we prepared Pt-loaded SnO2 monodispersed nanoparticles through hydrothermal method and assembled a sensor based on micro-electro-mechanical system (MEMS) to detect toluene. Compared with the pure SnO2, the 2.92 wt% Pt-loaded SnO2 sensor exhibits a 2.75 times higher gas sensitivity to toluene at about 330 & DEG;C. Meanwhile, the 2.92 wt% Pt-loaded SnO2 sensor also has a stable and good response to 100 ppb of toluene. Its theoretical detection limit is calculated as low as 12.6 ppb. Also, the sensor has a short response time of & SIM;10 s to different gas concentrations, as well as the excellent dynamic response-recovery characteristics, selectivity, and stability. The improved performance of Pt-loaded SnO2 sensor can be explained by the increase of oxygen vacancies and chemisorbed oxygen species. The electronic and chemical sensitization of Pt to SnO2-based sensor, together with small size and fast gas diffusion of the MEMS design ensured fast response and ultra-low toluene detection. This provides new ideas and decent prospect for developing miniaturized, low-power-consumption, and portable application of gas sensing devices.

引用

页数：15

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