Micromachined Optical Scanner Using Acoustic Radiation Force

被引：0
作者：
Sasaki, Takashi [1 ,2 ]
Takahashi, Yuya [1 ]
Hane, Kazuhiro [1 ,3 ]
机构：
[1] Tohoku Univ, Dept Finemech, Sendai, Miyagi, Japan
[2] Silicon Austria Labs, Piezoelect Microsyst Technol, Villach, Austria
[3] Tohoku Univ, New Ind Creat Hatchery Ctr, Sendai, Miyagi, Japan
来源：
2023 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS, OMN AND SBFOTON INTERNATIONAL OPTICS AND PHOTONICS CONFERENCE, SBFOTON IOPC | 2023年
关键词：
optical scanner; acoustic radiation force; non-contact repulsive force;
D O I：
10.1109/OMN/SBFOTONIOPC58971.2023.10230923
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper reports on a micromachined 1D optical scanner using acoustic radiation force. This novel method allows us to actuate the mirror statically without any electrical connection by means of noncontact repulsive force generated by an acoustic radiator placed more than 2 mm far from the mirror. The optical scanning angle of more than 60 degrees was shown by a fabricated 2 mm square mirror in the experiment.
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页数：2
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