Thin-film lithium niobate electro-optic modfaulators: To etch or not to etch

被引:15
作者
Mookherjea, Shayan [1 ]
Mere, Viphretuo [1 ]
Valdez, Forrest [1 ]
机构
[1] Univ Calif San Diego, Dept Elect & Comp Engn, La Jolla, CA 92093 USA
关键词
MACH-ZEHNDER MODULATORS; WAVE-GUIDES; 110; GHZ; SILICON; PHOTONICS; INTEGRATION; VOLTAGE; DEVICES;
D O I
10.1063/5.0142232
中图分类号
O59 [应用物理学];
学科分类号
摘要
This Perspective discusses and compares several different approaches to the design of high-bandwidth, low-voltage electro-optic devices, such as Mach-Zehnder modulators, made using thin-film lithium niobate (TFLN) and strategies for their incorporation as part of a larger photonic integrated circuit (PIC).
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页数:8
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共 77 条
[1]   Integration of quantum dots with lithium niobate photonics [J].
Aghaeimeibodi, Shahriar ;
Desiatov, Boris ;
Kim, Je-Hyung ;
Lee, Chang-Min ;
Buyukkaya, Mustafa Atabey ;
Karasahin, Aziz ;
Richardson, Christopher J. K. ;
Leavitt, Richard P. ;
Loncar, Marko ;
Waks, Edo .
APPLIED PHYSICS LETTERS, 2018, 113 (22)
[2]   Vertical mode transition in hybrid lithium niobate and silicon nitride-based photonic integrated circuit structures [J].
Ahmed, Abu Naim R. ;
Mercante, Andrew ;
Shi, Shouyuan ;
Yao, Peng ;
Prather, Dennis W. .
OPTICS LETTERS, 2018, 43 (17) :4140-4143
[3]  
[Anonymous], 2003, Waveguide Nonlinear-Optic Devices
[4]   Low drive voltage, broad-band LiNbO3 modulators with and without etched ridges [J].
Burns, WK ;
Howerton, MM ;
Moeller, RP ;
Krähenbühl, R ;
McElhanon, RW ;
Greenblatt, AS .
JOURNAL OF LIGHTWAVE TECHNOLOGY, 1999, 17 (12) :2551-2555
[5]   Waveguides in single-crystal lithium niobate thin film by proton exchange [J].
Cai, Lutong ;
Han, Shuang Li Huangpu ;
Hu, Hui .
OPTICS EXPRESS, 2015, 23 (02) :1240-1248
[6]   Hybrid amorphous silicon (a-Si:H)-LiNbO3 electro-optic modulator [J].
Cao, Liang ;
Aboketaf, Abdelsalam ;
Wang, Zihao ;
Preble, Stefan .
OPTICS COMMUNICATIONS, 2014, 330 :40-44
[7]   Heterogeneous integration of lithium niobate and silicon nitride waveguides for wafer-scale photonic integrated circuits on silicon [J].
Chang, Lin ;
Pfeiffer, Martin H. P. ;
Volet, Nicolas ;
Zervas, Michael ;
Peters, Jon D. ;
Manganelli, Costanza L. ;
Stanton, Eric J. ;
Li, Yifei ;
Kippenberg, Tobias J. ;
Bowers, John E. .
OPTICS LETTERS, 2017, 42 (04) :803-806
[8]  
Chen A, 2012, BROADBAND OPTICAL MODULATORS: SCIENCE, TECHNOLOGY, AND APPLICATIONS, P1
[9]   Compact 100GBaud driverless thin-film lithium niobate modulator on a silicon substrate [J].
Chen, Gengxin ;
Chen, Kaixuan ;
Zhang, Junwei ;
Gan, Ranfeng ;
Qi, Lu ;
Fan, Xuancong ;
Ruan, Ziliang ;
Lin, Zhenrui ;
Liu, Jie ;
Lu, Chao ;
Lau, Alan Pak Tao ;
Dai, Daoxin ;
Guo, Changjian ;
Liu, Liu .
OPTICS EXPRESS, 2022, 30 (14) :25308-25317
[10]   High performance thin-film lithium niobate modulator on a silicon substrate using periodic capacitively loaded traveling-wave electrode [J].
Chen, Gengxin ;
Chen, Kaixuan ;
Gan, Ranfeng ;
Ruan, Ziliang ;
Wang, Zong ;
Huang, Pucheng ;
Lu, Chao ;
Lau, Alan Pak Tao ;
Dai, Daoxin ;
Guo, Changjian ;
Liu, Liu .
APL PHOTONICS, 2022, 7 (02)