[1] Dalian Univ Technol, Sch Integrated Circuits, Dalian 116620, Peoples R China
[2] Chinese Acad Sci, State Key Lab Mol React Dynam, Dalian Inst Chem Phys, Dalian 116023, Peoples R China
[3] Dalian Univ Technol, Key Lab Mat Modificat Laser Ion & Electron Beams, Sch Phys, Minist Educ, Dalian 116024, Peoples R China