Recent Developments in Wearable NEMS/MEMS-Based Smart Infrared Sensors for Healthcare Applications

被引：22

作者：

Padha, Bhavya ^{[1
,2
]}

Yadav, Isha ^{[2
]}

Dutta, Shankar ^{[2
]}

Arya, Sandeep ^{[1
]}

机构：

[1] Univ Jammu, Dept Phys, Jammu 180006, Jammu & Kashmir, India

[2] Def Res Dev Org, Solid State Phys Lab, New Delhi 110054, India

来源：

ACS APPLIED ELECTRONIC MATERIALS | 2023年 / 5卷 / 10期

关键词：

MEMS; NEMS; bolometers; wearable sensors; healthcare; IR radiation; HIGH-TEMPERATURE COEFFICIENT; VANADIUM-OXIDE FILMS; THIN-FILMS; IR BOLOMETERS; MICROBOLOMETER ARRAYS; AMORPHOUS GEXSI1-XOY; DRUG-DELIVERY; FABRICATION; MEMS; PERFORMANCE;

D O I：

10.1021/acsaelm.3c00860

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Incorporating nano- and microelectromechanical systems (NEMS/MEMS)-based sensors in clothing and developing more compact and flexible devices have gained popularity recently. NEMS/MEMS-based bolometers/sensors have gained significance due to their high sensitivity and accuracy in measuring physical parameters such as temperature, humidity, pressure, and infrared (IR) and ultraviolet (UV) radiations. When worn on the body, bolometers can be employed in various applications such as environmental monitoring or health tracking. This review highlights the progress of smart wearable bolometers as NEMS/MEMS-based sensors in the healthcare industry. Instead of visiting multiple healthcare facilities or devices, now people can assess their health status by measuring body temperature, sensing motion, respiratory functioning, blood pressure, oxygen levels of the blood, and heart functioning by integrating these devices into fabriclike garments, socks, shoe insoles, wrist watches, and other pieces of clothing. The article concludes by describing their varied challenges and possible solutions and prospects.

引用

页码：5386 / 5411

页数：26

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