Recent Developments in Wearable NEMS/MEMS-Based Smart Infrared Sensors for Healthcare Applications

被引：13
作者：
Padha, Bhavya [1 ,2 ]
Yadav, Isha [2 ]
Dutta, Shankar [2 ]
Arya, Sandeep [1 ]
机构：
[1] Univ Jammu, Dept Phys, Jammu 180006, Jammu & Kashmir, India
[2] Def Res Dev Org, Solid State Phys Lab, New Delhi 110054, India
来源：
ACS APPLIED ELECTRONIC MATERIALS | 2023年 / 5卷 / 10期
关键词：
MEMS; NEMS; bolometers; wearable sensors; healthcare; IR radiation; HIGH-TEMPERATURE COEFFICIENT; VANADIUM-OXIDE FILMS; THIN-FILMS; IR BOLOMETERS; MICROBOLOMETER ARRAYS; AMORPHOUS GEXSI1-XOY; DRUG-DELIVERY; FABRICATION; MEMS; PERFORMANCE;
D O I：
10.1021/acsaelm.3c00860
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Incorporating nano- and microelectromechanical systems (NEMS/MEMS)-based sensors in clothing and developing more compact and flexible devices have gained popularity recently. NEMS/MEMS-based bolometers/sensors have gained significance due to their high sensitivity and accuracy in measuring physical parameters such as temperature, humidity, pressure, and infrared (IR) and ultraviolet (UV) radiations. When worn on the body, bolometers can be employed in various applications such as environmental monitoring or health tracking. This review highlights the progress of smart wearable bolometers as NEMS/MEMS-based sensors in the healthcare industry. Instead of visiting multiple healthcare facilities or devices, now people can assess their health status by measuring body temperature, sensing motion, respiratory functioning, blood pressure, oxygen levels of the blood, and heart functioning by integrating these devices into fabriclike garments, socks, shoe insoles, wrist watches, and other pieces of clothing. The article concludes by describing their varied challenges and possible solutions and prospects.
引用
收藏
页码：5386 / 5411
页数：26
相关论文
共 231 条
  • [1] Characterization of amorphous GexSi1-xOy for micromachined uncooled bolometer applications
    Ahmed, AHZ
    Tait, RN
    [J]. JOURNAL OF APPLIED PHYSICS, 2003, 94 (08) : 5326 - 5332
  • [2] A New MEMS-Based System for Ultra-High-Resolution Imaging at Elevated Temperatures
    Allard, Lawrence F.
    Bigelow, Wilbur C.
    Jose-Yacaman, Miguel
    Nackashi, David P.
    Damiano, John
    Mick, Stephen E.
    [J]. MICROSCOPY RESEARCH AND TECHNIQUE, 2009, 72 (03) : 208 - 215
  • [3] A thermal emissions-based real-time monitoring system for in situ detection of fatigue cracks
    Amjad, K.
    Lambert, P.
    Middleton, C. A.
    Greene, R. J.
    Patterson, E. A.
    [J]. PROCEEDINGS OF THE ROYAL SOCIETY A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES, 2022, 478 (2266):
  • [4] SiGe/Si quantum structures as a thermistor material for low cost IR microbolometer focal plane arrays
    Andersson, J. Y.
    Ericsson, P.
    Radamson, H. H.
    Wissmar, S. G. E.
    Kolandouz, M.
    [J]. SOLID-STATE ELECTRONICS, 2011, 60 (01) : 100 - 104
  • [5] [Anonymous], 2005, M. S. Thesis
  • [6] app.dimensions.ai, About us
  • [7] Recent Research and Developing Trends of Wearable Sensors for Detecting Blood Pressure
    Arakawa, Toshiya
    [J]. SENSORS, 2018, 18 (09)
  • [8] Araya-Farias M, 2020, Handbook on Miniaturization in Analytical Chemistry, P35, DOI [10.1016/b978-0-12-819763-9.00003-9, DOI 10.1016/B978-0-12-819763-9.00003-9]
  • [9] Recent improvements and developments in Uncooled systems at BAE SYSTEMS North America
    Backer, BS
    Butler, N
    Kohin, M
    Gurnee, M
    Whitwam, JT
    Breen, T
    [J]. INFRARED DETECTORS AND FOCAL PLANE ARRAYS VII, 2002, 4721 : 83 - 90
  • [10] Banerjee A., 2020, Terahertz Biomedical and Healthcare Technologies, P145
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