An Autofocus Method Based on Improved Differential Confocal Microscopy in Two-Photon Lithography

被引:3
作者
Yang, Zhenyu [1 ]
He, Minfei [1 ]
Zhou, Guozun [1 ]
Kuang, Cuifang [1 ,2 ,3 ,4 ]
Liu, Xu [1 ]
机构
[1] Zhejiang Univ, Coll Opt Sci & Engn, State Key Lab Extreme Photon & Instrumentat, Hangzhou 310027, Peoples R China
[2] ZJU Hangzhou Global Sci & Technol Innovat Ctr, Hangzhou 311121, Peoples R China
[3] Shanxi Univ, Collaborat Innovat Ctr Extreme Opt, Taiyuan 030006, Peoples R China
[4] Zhejiang Univ, Ningbo Res Inst, Ningbo 315100, Peoples R China
基金
中国国家自然科学基金;
关键词
autofocus; confocal microscopy; laser direct writing lithography; SYSTEM;
D O I
10.3390/photonics10030338
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Two-photon lithography (TPL) plays a vital role in microstructure fabrication due to its high processing accuracy and maskless characteristics. To optimize the manufacturing quality deteriorated by the defocus of the substrate, an autofocus approach based on improved differential confocal microscopy (IDCM) is proposed in this paper. Through analyzing the intensity response signals from two detectors with symmetrical axial offset, the defocus amount is measured and compensated for with high precision and noise immunity to stabilize the substrate. The verification experiments on the coverslip reported a detection sensitivity of 5 nm, a repetitive measurement accuracy of less than 15 nm, and a focusing accuracy reaching around 5 nm. The consistency between simulation and characterization demonstrated the effectiveness and superior performance of the autofocus system for the high production quality of the metalens array. The proposed autofocus method shows promise for further application to the fabrication of complex structures on various substrates.
引用
收藏
页数:13
相关论文
共 30 条
[21]   Dual differential confocal method for surface profile measurement with a large sensing measurement range [J].
Shao, Rongjun ;
Zhao, Weigian ;
Qiu, Lirong ;
Wang, Yun ;
Zhang, Ruirui ;
Zhang, Chenglong .
APPLIED OPTICS, 2020, 59 (03) :614-621
[22]   Theoretical analysis and property study of optical focus detection based on differential confocal microscopy [J].
Tan, JB ;
Wang, FS .
MEASUREMENT SCIENCE AND TECHNOLOGY, 2002, 13 (08) :1289-1293
[23]   A lateral differential confocal microscopy for accurate detection and localization of edge contours [J].
Wang, Yifan ;
Kuang, Cuifang ;
Xiu, Peng ;
Li, Shuai ;
Hao, Xiang ;
Liu, Xu .
OPTICS AND LASERS IN ENGINEERING, 2014, 53 :12-18
[24]   Accurate surface profilometry using differential optical sectioning microscopy with structured illumination [J].
Xie, Zhongye ;
Tang, Yan ;
Feng, Jinhua ;
Liu, Junbo ;
Hu, Song .
OPTICS EXPRESS, 2019, 27 (08) :11721-11733
[25]   Structural multi-colour invisible inks with submicron 4D printing of shape memory polymers [J].
Zhang, Wang ;
Wang, Hao ;
Wang, Hongtao ;
Chan, John You En ;
Liu, Hailong ;
Zhang, Biao ;
Zhang, Yuan-Fang ;
Agarwal, Komal ;
Yang, Xiaolong ;
Ranganath, Anupama Sargur ;
Low, Hong Yee ;
Ge, Qi ;
Yang, Joel K. W. .
NATURE COMMUNICATIONS, 2021, 12 (01)
[26]   A Novel Auto-Focus Method for Image Processing Using Laser Triangulation [J].
Zhang, Xiaobo ;
Fan, Fumin ;
Gheisari, Mehdi ;
Srivastava, Gautam .
IEEE ACCESS, 2019, 7 :64837-64843
[27]   Improvement in focusing accuracy of DNA sequencing microscope with multi-position laser differential confocal autofocus method [J].
Zhang, Xin ;
Zeng, Fei ;
Li, Yi ;
Qiao, Yanfeng .
OPTICS EXPRESS, 2018, 26 (02) :895-904
[28]   Laser differential confocal radius measurement [J].
Zhao, Weiqian ;
Sun, Ruoduan ;
Qiu, Lirong ;
Sha, Dingguo .
OPTICS EXPRESS, 2010, 18 (03) :2345-2360
[29]   Bipolar absolute differential confocal approach to higher spatial resolution [J].
Zhao, WQ ;
Tan, JB ;
Qiu, LR .
OPTICS EXPRESS, 2004, 12 (21) :5013-5021
[30]   A method for positioning the focal spot location of two photon polymerization [J].
Zheng, Xu ;
Cheng, Kai ;
Zhou, Xiaoqin ;
Lin, Jieqiong ;
Jing, Xian .
AIP ADVANCES, 2017, 7 (09)