Bending 90° Waveguides in Nd:YAG Crystal Fabricated by a Combination of Femtosecond Laser Inscription and Precise Diamond Blade Dicing

被引：2

作者：

Zha, Hao ^{[1
]}

Yao, Yicun ^{[1
]}

Wang, Minghong ^{[1
]}

Chen, Nankuang ^{[1
]}

Zhang, Liqiang ^{[1
]}

Bai, Chenglin ^{[1
]}

Liu, Tao ^{[2
]}

Ren, Yingying ^{[3
,4
]}

Jia, Yuechen ^{[5
]}

机构：

[1] Liaocheng Univ, Sch Phys Sci & Informat Technol, Liaocheng 252000, Peoples R China

[2] Qingdao Univ, Sch Elect & Informat Engn, Qingdao 266071, Peoples R China

[3] Shandong Normal Univ, Ctr Light Manipulat & Applicat, Sch Phys & Elect, Jinan 250014, Peoples R China

[4] Shandong Normal Univ, Sch Phys & Elect, Shandong Prov Key Lab Opt & Photon Device, Jinan 250014, Peoples R China

[5] Shandong Univ, Sch Phys, State Key Lab Crystal Mat, Jinan 250100, Peoples R China

来源：

CRYSTALS | 2023年 / 13卷 / 02期

基金：

中国国家自然科学基金;

关键词：

Nd; YAG; femtosecond laser inscription; precise diamond blade dicing; waveguide bending; REFRACTIVE-INDEX; LITHIUM-NIOBATE; WRITTEN; SENSOR;

D O I：

10.3390/cryst13020188

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

In this paper, a low-loss 90 degrees-bending design in femtosecond laser-induced double-line waveguides is theoretically proposed and experimentally demonstrated. The bending is realized based on the total internal reflection of a corner mirror (made by precise diamond blade dicing) located at the intersection of a pair of waveguides perpendicular to each other. The waveguide bending performance was birefringence free, with the insertion loss of each bending below 0.8 dB. This method provides great flexibility and has great potential for the design of integrated photonics based on femtosecond laser-inscribed crystalline materials.

引用

页数：10

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