共 50 条
[11]
Stitching error reduction in electron beam lithography with in-situ feedback using self-developing resist
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
2013, 31 (06)
[12]
A Multipurpose and Highly-Compact Plasmonic Filter Based on Metal-Insulator-Metal Waveguides
[J].
IEEE PHOTONICS JOURNAL,
2020, 12 (03)
[18]
PARALLEL END-BUTT COUPLING FOR OPTICAL INTEGRATED-CIRCUITS
[J].
APPLIED OPTICS,
1977, 16 (04)
:1026-1032