Review of thin-film resistor sensors: Exploring materials, classification, and preparation techniques

Sensors play a pivotal role in modern science and industry. To develop and manufacture high-performance sensors, the selection of appropriate substrate materials, understanding the various types of sensors and their applications, and employing effective fabrication techniques are essential. In this paper, a comprehensive survey is presented on the recent progress in these three core areas. Firstly, the paper analyzes substrate materials for sensors, including metals, semiconductors, and polymers, and explores their characteristics and applications in different types of sensors. Secondly, it provides an overview of the main categories of sensors, including pressure, temperature, and gas sensors, and analyzes their operating principles and applications through several recent case studies. Lastly, fabrication methods for sensors are discussed, and an analysis of how these methods impact the performance and reliability of sensors is presented. This paper aims to offer a preliminary guide for researchers and engineers to make informed decisions in the development and manufacturing of sensors.