Cryo-Compatible In Situ Strain Tuning of 2D Material-Integrated Nanocavity

Tunablenanophotonic resonators are an essential building blockfor material-integrated photonic systems and solid-state cavity quantumelectrodynamic experiments. Matching the cavity resonance with thematerial optical transition is crucial for enhancing the light-matterinteraction, leading to various associated phenomena that have importantimplications in quantum optics and optoelectronics. However, our inabilityto precisely control the resonant wavelength of nanofabricated opticalcavities necessitates the use of postfabrication dynamical tuning,which is a challenging prospect, especially in cryogenic environmentsrequired for various quantum optical effects. Here, we realize a largein situ strain tuning of an integrated monolayer WSe2-galliumphosphide cavity device. We demonstrated tuning an on-substrate cavitywith a quality (Q)-factor of & SIM;3500 at & SIM;780nm by & SIM;5 nm without any degradation of the Q-factor at cryogenic temperature. The tunable cavity modes are manifestedas cavity-enhanced monolayer exciton photoluminescence.