Development of MKIDs in the Optical and Near-Infrared Bands for SPIAKID

SpectroPhotometric Imaging in Astronomy with Kinetic Inductance Detectors (SPIAKID) aims at designing, building, and deploying on the sky a spectrophotometric imager based on microwave kinetic inductance detectors (MKIDs) in the optical and near-infrared bands. MKIDs show a fast response and the ability to resolve photon energy compared to the conventional Charge-coupled Devices (CCDs). In this paper, we present the design and simulation of the MKID arrays for SPIAKID. The detectors consist of four arrays with each array of 20,000 lumped-element pixels, and each array will be read with 10 readout lines. The meander material of the resonators is trilayer TiN/Ti/TiN to have better uniformity of the critical temperature across the array. We also present the measurement result for a test array with 30x30\documentclass[12pt]{minimal} \usepackage{amsmath} \usepackage{wasysym} \usepackage{amsfonts} \usepackage{amssymb} \usepackage{amsbsy} \usepackage{mathrsfs} \usepackage{upgreek} \setlength{\oddsidemargin}{-69pt} \begin{document}$$30\times 30$$\end{document} pixels which is a subset of the designed 2000-pixel array to verify the design and fabrication. The current measured best energy-resolving power R=E/Delta E\documentclass[12pt]{minimal} \usepackage{amsmath} \usepackage{wasysym} \usepackage{amsfonts} \usepackage{amssymb} \usepackage{amsbsy} \usepackage{mathrsfs} \usepackage{upgreek} \setlength{\oddsidemargin}{-69pt} \begin{document}$$R = E/\Delta E$$\end{document} is 2.4 at lambda=405nm\documentclass[12pt]{minimal} \usepackage{amsmath} \usepackage{wasysym} \usepackage{amsfonts} \usepackage{amssymb} \usepackage{amsbsy} \usepackage{mathrsfs} \usepackage{upgreek} \setlength{\oddsidemargin}{-69pt} \begin{document}$$\lambda = 405\,\text {nm}$$\end{document} and the current medium R is around 1.7. We have also observed that the response of the TiN/Ti/TiN is much smaller than expected.