Fast measurement of wavefront aberration in double-grating Ronchi lateral shearing interferometry

被引：4
作者：
Lu, Yunjun [1 ,2 ]
Tang, Feng [1 ,2 ]
Li, Zhongliang [1 ,2 ]
Wang, Xiangzhao [1 ,2 ]
机构：
[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Lab Informat Opt & Optoelect Technol, Shanghai, Peoples R China
[2] Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing, Peoples R China
来源：
OPTICAL ENGINEERING | 2023年 / 62卷 / 03期
基金：
中国国家自然科学基金;
关键词：
fast wavefront measurement; Ronchi lateral shearing interferometry; phase retrieval; metrology; ZERNIKE POLYNOMIALS; RECONSTRUCTION; ALGORITHM; INTERFEROGRAMS; FREQUENCY;
D O I：
10.1117/1.OE.62.3.034105
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
The accuracy of the shear-phase retrieval method is critical for accurate wavefront aberration measurements in double-grating Ronchi lateral shearing interferometry. Currently, the suppression of the interferences of unwanted diffractions generated by the Ronchi grating at the image plane is eliminated by adding more phase shifts, which increases the measurement time. Here, a stepped phase-shifting algorithm is proposed to suppress the unwanted diffractions and retrieve the shear phase between +/- 1st orders accurately with fewer phase shifts, and the measurement efficiency can be increased by 25% at least. The minimum number of phase shifts, which depends on the high diffraction orders existing in the interferograms, is analyzed. The proposed method was verified via numerical simulations and experiments. The wavefront measurement was validated via a comparison with the results of point-diffracted interferometry, and the root-mean-square difference was within 2.0 nm. (c) 2023 Society of Photo-Optical Instrumentation Engineers (SPIE)
引用
收藏
页数：16
相关论文
共 39 条
[1]  
[Anonymous], 1968, Principles of Optics
[2]   Improved Ronchi test with extended source [J].
Braat, J ;
Janssen, AJEM .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1999, 16 (01) :131-140
[3]   Generalized zonal wavefront reconstruction for high spatial resolution in lateral shearing interferometry [J].
Dai, Fengzhao ;
Tang, Feng ;
Wang, Xiangzhao ;
Sasaki, Osami .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 2012, 29 (09) :2038-2047
[4]   Modal wavefront reconstruction based on Zernike polynomials for lateral shearing interferometry: comparisons of existing algorithms [J].
Dai, Fengzhao ;
Tang, Feng ;
Wang, Xiangzhao ;
Sasaki, Osami ;
Feng, Peng .
APPLIED OPTICS, 2012, 51 (21) :5028-5037
[5]   Extending immersion lithography down to 1x nm production nodes [J].
de Boeij, Wim ;
Pieternella, Remi ;
Bouchoms, Igor ;
Leenders, Martijn ;
Hoofman, Marjan ;
de Graaf, Roelof ;
Kok, Haico ;
Broman, Par ;
Smits, Joost ;
Kuit, Jan-Jaap ;
McLaren, Matthew .
OPTICAL MICROLITHOGRAPHY XXVI, 2013, 8683
[6]   SNR improvement of 8.2 dB in a self-mixing laser diode interferometer by using the difference signal at the output mirrors [Invited] [J].
Donati, Silvano ;
Norgia, Michele .
CHINESE OPTICS LETTERS, 2021, 19 (09)
[7]   Wave-front reconstruction from shear phase maps by use of the discrete Fourier transform [J].
Dubra, A ;
Paterson, C ;
Dainty, C .
APPLIED OPTICS, 2004, 43 (05) :1108-1113
[8]   The impact of aberration averaging during step-and-scan on the photolithographic process [J].
Erdmann, A ;
Arnz, M .
MICROELECTRONIC ENGINEERING, 1998, 42 :117-120
[9]   A general method of designing phase-shifting algorithms for grating lateral shearing interferometry [J].
Fang, Chao ;
Xiang, Yang ;
Qi, Ke-qi .
FRONTIERS OF INFORMATION TECHNOLOGY & ELECTRONIC ENGINEERING, 2018, 19 (06) :809-814
[10]   An 11-frame phase shifting algorithm in lateral shearing interferometry [J].
Fang, Chao ;
Xiang, Yang ;
Qi, Keqi ;
Zhang, Chunlei ;
Yu, Changsong .
OPTICS EXPRESS, 2013, 21 (23) :28325-28333
1234