Special issues and sections;
Meetings;
Semiconductor device manufacture;
D O I:
10.1109/TSM.2023.3323254
中图分类号:
T [工业技术];
学科分类号:
08 ;
摘要:
Since its beginning in 1992 in Japan, International Symposium on Semiconductor Manufacturing (ISSM) has provided unique opportunities to share the best practices of semiconductor manufacturing technologies for professionals. At the symposiums, semiconductor manufacturing professionals discussed the technologies developed to meet the worldwide requirements for advanced manufacturing. It is becoming crucial to re-examine semiconductor manufacturing in terms of fundamental principles to improve the performance of semiconductor devices. Moreover, utilizing artificial intelligence and machine learning technologies to improve semiconductor manufacturing have become a new challenge. These manufacturing technology challenges are showing the need for drastic revolutionary concept and stronger collaborative efforts to find solutions to the precompetitive challenges.
机构:
Natl Yang Ming Chiao Tung Univ, Dept Elect & Elect Engn, Hsinchu 30010, TaiwanNatl Yang Ming Chiao Tung Univ, Dept Elect & Elect Engn, Hsinchu 30010, Taiwan
Chen, Wei-Zen
Calhoun, Benton H.
论文数: 0引用数: 0
h-index: 0
机构:
Charles L Brown Dept Elect & Comp Engn, Charlottesville, VA 22904 USANatl Yang Ming Chiao Tung Univ, Dept Elect & Elect Engn, Hsinchu 30010, Taiwan
Calhoun, Benton H.
Yang, Chia-Hsiang
论文数: 0引用数: 0
h-index: 0
机构:
Natl Taiwan Univ, Grad Inst Elect Engn, Dept Elect Engn, Taipei 10617, TaiwanNatl Yang Ming Chiao Tung Univ, Dept Elect & Elect Engn, Hsinchu 30010, Taiwan
Yang, Chia-Hsiang
Sen, Shreyas
论文数: 0引用数: 0
h-index: 0
机构:
Purdue Univ, Elmore Family Sch Elect & Comp Engn, W Lafayette, IN 47907 USANatl Yang Ming Chiao Tung Univ, Dept Elect & Elect Engn, Hsinchu 30010, Taiwan
Sen, Shreyas
Yang, Jun
论文数: 0引用数: 0
h-index: 0
机构:
Southeast Univ, Sch Elect Sci & Engn, Nanjing 210096, Peoples R ChinaNatl Yang Ming Chiao Tung Univ, Dept Elect & Elect Engn, Hsinchu 30010, Taiwan
机构:
Natl Yang Ming Chiao Tung Univ, Dept Elect & Elect Engn, Hsinchu 30010, TaiwanNatl Yang Ming Chiao Tung Univ, Dept Elect & Elect Engn, Hsinchu 30010, Taiwan
Hung, Chung-Chih
Atef, Mohamed
论文数: 0引用数: 0
h-index: 0
机构:
United Arab Emirates Univ, Dept Elect & Commun Engn, Al Ain, Abu Dhabi, U Arab EmiratesNatl Yang Ming Chiao Tung Univ, Dept Elect & Elect Engn, Hsinchu 30010, Taiwan
Atef, Mohamed
Chen, Vanessa
论文数: 0引用数: 0
h-index: 0
机构:
Carnegie Mellon Univ, Dept Elect & Comp Engn, Pittsburgh, PA USANatl Yang Ming Chiao Tung Univ, Dept Elect & Elect Engn, Hsinchu 30010, Taiwan
机构:
Mohamed Bin Zayed Univ Artificial Intelligence, Abu Dhabi, U Arab Emirates
Australian Natl Univ, Canberra 2601, AustraliaMohamed Bin Zayed Univ Artificial Intelligence, Abu Dhabi, U Arab Emirates
Khan, Salman
Khan, Fahad Shahbaz
论文数: 0引用数: 0
h-index: 0
机构:
Mohamed Bin Zayed Univ Artificial Intelligence, Abu Dhabi, U Arab Emirates
Linkoping Univ, S-58183 Linkoping, SwedenMohamed Bin Zayed Univ Artificial Intelligence, Abu Dhabi, U Arab Emirates
Khan, Fahad Shahbaz
Vaswani, Ashish
论文数: 0引用数: 0
h-index: 0
机构:
Stealth, Mt View, WY USAMohamed Bin Zayed Univ Artificial Intelligence, Abu Dhabi, U Arab Emirates
Vaswani, Ashish
Parmar, Niki
论文数: 0引用数: 0
h-index: 0
机构:
Stealth, Mt View, WY USAMohamed Bin Zayed Univ Artificial Intelligence, Abu Dhabi, U Arab Emirates
Parmar, Niki
Yang, Ming-Hsuan
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif Merced, Merced, CA 95343 USAMohamed Bin Zayed Univ Artificial Intelligence, Abu Dhabi, U Arab Emirates
Yang, Ming-Hsuan
Shah, Mubarak
论文数: 0引用数: 0
h-index: 0
机构:
Univ Cent Florida, Orlando, FL 32816 USAMohamed Bin Zayed Univ Artificial Intelligence, Abu Dhabi, U Arab Emirates
机构:
Natl Yang Ming Chiao Tung Univ, Dept Elect & Elect Engn, Hsinchu 30010, TaiwanNatl Yang Ming Chiao Tung Univ, Dept Elect & Elect Engn, Hsinchu 30010, Taiwan
Chen, Wei-Zen
Calhoun, Benton H.
论文数: 0引用数: 0
h-index: 0
机构:
Charles L Brown Dept Elect & Comp Engn, Charlottesville, VA 22904 USANatl Yang Ming Chiao Tung Univ, Dept Elect & Elect Engn, Hsinchu 30010, Taiwan
Calhoun, Benton H.
Yang, Chia-Hsiang
论文数: 0引用数: 0
h-index: 0
机构:
Natl Taiwan Univ, Grad Inst Elect Engn, Dept Elect Engn, Taipei 10617, TaiwanNatl Yang Ming Chiao Tung Univ, Dept Elect & Elect Engn, Hsinchu 30010, Taiwan
Yang, Chia-Hsiang
Sen, Shreyas
论文数: 0引用数: 0
h-index: 0
机构:
Purdue Univ, Elmore Family Sch Elect & Comp Engn, W Lafayette, IN 47907 USANatl Yang Ming Chiao Tung Univ, Dept Elect & Elect Engn, Hsinchu 30010, Taiwan
Sen, Shreyas
Yang, Jun
论文数: 0引用数: 0
h-index: 0
机构:
Southeast Univ, Sch Elect Sci & Engn, Nanjing 210096, Peoples R ChinaNatl Yang Ming Chiao Tung Univ, Dept Elect & Elect Engn, Hsinchu 30010, Taiwan
机构:
Natl Yang Ming Chiao Tung Univ, Dept Elect & Elect Engn, Hsinchu 30010, TaiwanNatl Yang Ming Chiao Tung Univ, Dept Elect & Elect Engn, Hsinchu 30010, Taiwan
Hung, Chung-Chih
Atef, Mohamed
论文数: 0引用数: 0
h-index: 0
机构:
United Arab Emirates Univ, Dept Elect & Commun Engn, Al Ain, Abu Dhabi, U Arab EmiratesNatl Yang Ming Chiao Tung Univ, Dept Elect & Elect Engn, Hsinchu 30010, Taiwan
Atef, Mohamed
Chen, Vanessa
论文数: 0引用数: 0
h-index: 0
机构:
Carnegie Mellon Univ, Dept Elect & Comp Engn, Pittsburgh, PA USANatl Yang Ming Chiao Tung Univ, Dept Elect & Elect Engn, Hsinchu 30010, Taiwan
机构:
Mohamed Bin Zayed Univ Artificial Intelligence, Abu Dhabi, U Arab Emirates
Australian Natl Univ, Canberra 2601, AustraliaMohamed Bin Zayed Univ Artificial Intelligence, Abu Dhabi, U Arab Emirates
Khan, Salman
Khan, Fahad Shahbaz
论文数: 0引用数: 0
h-index: 0
机构:
Mohamed Bin Zayed Univ Artificial Intelligence, Abu Dhabi, U Arab Emirates
Linkoping Univ, S-58183 Linkoping, SwedenMohamed Bin Zayed Univ Artificial Intelligence, Abu Dhabi, U Arab Emirates
Khan, Fahad Shahbaz
Vaswani, Ashish
论文数: 0引用数: 0
h-index: 0
机构:
Stealth, Mt View, WY USAMohamed Bin Zayed Univ Artificial Intelligence, Abu Dhabi, U Arab Emirates
Vaswani, Ashish
Parmar, Niki
论文数: 0引用数: 0
h-index: 0
机构:
Stealth, Mt View, WY USAMohamed Bin Zayed Univ Artificial Intelligence, Abu Dhabi, U Arab Emirates
Parmar, Niki
Yang, Ming-Hsuan
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif Merced, Merced, CA 95343 USAMohamed Bin Zayed Univ Artificial Intelligence, Abu Dhabi, U Arab Emirates
Yang, Ming-Hsuan
Shah, Mubarak
论文数: 0引用数: 0
h-index: 0
机构:
Univ Cent Florida, Orlando, FL 32816 USAMohamed Bin Zayed Univ Artificial Intelligence, Abu Dhabi, U Arab Emirates